For over 10 years, fabs and OEMs around the world have used the CCS Test Plans in order to reduce the effort and expertise needed for low-level interface verification and to assure that their equipment is automation-ready for production. CCS Envoy is the user application that executes the CCS Test Plans and ensures a consistent approach to testing all possible functions defined by the standards.
Thousands of hours have been invested in creating and validating the 24,000 test cases currently in the test plan portfolio. Fabs and OEMs collectively have executed these test plans hundreds of times on a variety of equipment models so they are known to run reliably and give accurate results. Many test plans have been refined and upgraded over the years, improving the quality and value of the test plan portfolio. The CCS Test Plans cover nearly 100% of the SEMI factory automation standards.
E4 SECS-I Unit TestThis test plan is used to verify requirements as defined by SEMI in its E4 standard, SEMI Equipment Communications Standard 1 Message Transfer (SECS-I). E30 GEM Unit TestThis test plan is used to verify requirements as defined by SEMI in its E30 standard, Generic Model for Communications and Control of Manufacturing Equipment. E37 HSMS-SS Unit TestThis test plan is used to verify requirements as defined by SEMI in its E37.1 standard, High-Speed SECS Message Service Single Selected Session Mode (HSMS-SS). E40 Process Management Unit TestThis test plan is used to verify requirements as defined by SEMI in its E40 Standard for Processing Management. E84 Enhanced PIO Unit TestThis test plan is used to verify requirements as defined by SEMI in its E84 standard, Specification for Enhanced Carrier Handoff Parallel I/O Interface. The test plan verifies the signal and handoff behavior between the AMHS and the equipment. | | E87 Carrier Management Unit TestThis test plan is used to verify requirements as defined by SEMI in its E87 standard, Specification for Carrier Management (CMS). E90 Substrate Tracking Unit TestThis test plan is used to verify requirements as defined by SEMI in its E90 standard, Specification for Substrate Tracking. E94 Control Job Management Unit TestThis test plan is used to verify requirements as defined by SEMI in its E94 standard, Specification for Control Job Management. E116 Equipment Performance TrackingThis test plan is used to verify requirements as defined by SEMI in its E116 Specification for Equipment Performance Tracking. ISMI 300mm Operational TestThis test plan is used to verify 300mm operational scenarios for fixed buffer and internal buffer equipment as defined by ISMI processing flowcharts. |