Title: The Importance of EEQA Common Component Template Definitions Author(s): Mike Thiessen, Gino Crispieri Affiliation: PEER Group, International SEMATECH Manufacturing Initiative (ISMI) Presenter: Mike Thiessen E-mail: mike.thiessen@peergroup.com
Enhanced Equipment Quality Assurance (EEQA) is the foundation of collaborative activities to lower cost and improve equipment availability in the semiconductor industry. Based on six important Equipment Engineering System (EES) guidelines that promote the definition, availability, and sharing of EES data, EEQA is the core activity that enables the OEM and IC maker to improve and increase equipment efficiency and reliability during its lifecycle. EEQA requires the OEM to make functional equipment data available by specifying parametric data as defined by the EEQA Common Component Templates. These templates focus on the functions, events, and data parameters of the equipment’s main components that the supplier and/or IC maker identifies are critical when monitoring the overall equipment’s function and its components’ performance to ensure process reliability. EEQA Common Component Templates are also used by IC makers to confirm that the equipment functions as the OEM intended and to facilitate the visualization and analysis of the data. Once data is made available by the OEM, both the OEM and IC maker can use the data to visualize, determine, and understand the equipment’s behavior and monitor and improve its functional performance. EEQA data helps track and improve the equipment’s reliability and efficiency. This presentation describes a collaborative effort between PEER Group and ISMI to identify common component data and events for equipment and highlights the importance of data that is not currently defined in any existing SEMI standard. Practical examples will focus on how this data can be managed on the tool and communicated to the IC maker. Additionally, the benefits of using this data for tool acceptance benchmarks will be analysed.