We have automated or tested almost 300 equipment models for fab customers. We understand fab automation requirements and have leveraged this experience to develop PEER Tool Orchestrator (PTOT), a configurable software application that enables OEMs to rapidly implement 300mm EFEM automation. In addition to the SEMI standards, the award-winning PTO product contains end-user operational scenarios that have been accepted in over 30 fabs worldwide.
PTO can be configured quickly for all types of metrology, inspection and process equipment with a variety of wafer transport robotics and scheduling requirements. The user interface can be customized to provide the end user with unique capabilities while continuing to enjoy the high reliability of the core PTO application.
OEMs often use PEER Group's automation services to implement PTO. Our experienced engineering team has completed 30 semiconductor equipment automation projects, from design through to QA testing and fab acceptance. We typically complete basic projects in five weeks, although it can take somewhat longer for projects requiring extensive customizations. As PTO has matured, many OEMs are choosing to use the PTO software development toolkit and do the implementation themselves. Either way, our OEM customers enjoy lower development costs, faster fab acceptance, and higher equipment reliability.
For additional information, download the PTO product overview. [pdf]
The latest release, PTO 4, targets high throughput, multi-chamber equipment.
Our PEER Tool Orchestrator (PTO) received Semiconductor International's prestigious 2007 Editor's Choice Award for best new product. These awards are given to commercially proven products that demonstrate excellence in semiconductor manufacturing and are used in numerous fabs around the world. For more information, read the press release.