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PEER Tool Orchestrator - Version 4 Product release

PEER Group's PEER Tool Orchestrator 4 (PTOT 4) is a major software release targeting the development of high throughput, multi-chamber equipment. PTO 4 features a new wafer scheduler along with a myriad of new user interface and control capabilities, as well as ready-to-use software drivers for the latest hardware components from leading automation suppliers. Leveraging the experience of 35 tool platforms, PTO 4's new capabilities enable equipment suppliers of today's most advanced tool configurations to quickly customize their equipment for each factory's unique process and automation requirements.

PTO 4's new scheduling software enables OEMs to take control of the timing, sequencing, and speed of automation components in order to achieve the highest possible throughput, even for individual tool shipments. The scheduler is fully extensible, allowing OEM software engineers to consider process timing information from the tool's control system and make predictive sequencing decisions. A PTO 4 beta user has achieved 400+ WPH throughput for their vacuum cluster tool and has successfully tested a wide variety of difficult recovery scenarios.

PTO 4 also features a new user interface development environment that provides OEMs advanced visualization techniques for presenting tool data. Designers can graphically represent the tool's topography, creating a user experience that is grasped quickly by the wide variety of engineers, technicians, and operators that may need to operate the tool manually. Information access has been improved with new quick-job editor, log viewer, and job history screens, enabling easier tool operation and troubleshooting. OEMs can efficiently create modern, tool-specific user interfaces that are loaded with information for real-time decision making.

By embedding the latest hardware drivers and factory requirements as configurable software components, PTO has always reduced the cost of developing and maintaining equipment software. With PTO 4, PEER Group is now able to offer producers of the most complex, multi-chamber equipment a rapid and robust software development platform that meets their customers' requirements for high throughput, flexible configuration and reliability.

About PEER Tool Orchestrator (PTO)

PTO is a field-proven, automation software product for semiconductor and photovoltaic equipment manufacturers of all types-from simple 200mm single-station metrology to advanced multi-chamber, vacuum cluster tools. Leveraging the experience of more than 35 tool platforms running in production in over 30 fabs around the world, PTO dramatically reduces the cost of tool automation software. PTO won the prestigious Semiconductor International "Best Product" award for 2007. Now in its 6th year, PTO has made the leap from a framework solution to a configurable product, providing OEMs of all sizes with a completely independent tool automation development platform. For more information, visit the PTO Homepage.

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