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GEM4Tools provides HMI/PLC-based equipment controllers complete SECS/GEM capabilities that will satisfy the requirements of any semiconductor, solar, LED or MES manufacturing facility. You can integrate GEM4Tools to your equipment controller’s OPC server in a matter of days.
GEM4Tools was specifically developed for HMI/PLC based equipment controllers, using the OPC standard as its foundation. OPC is the interface of choice for many OEMs and factory automation/process control solution providers, worldwide, which means your solution will rest on a proven standard and best practices. GEM4Tools works with any DA 2.0 compliant OPC server, whether you have developed your own, or are using one of the many HMI/SCADA packages available, such as:
Typically, suppliers of SECS and GEM applications have their own proprietary interface that must be used to build GEM capabilities into the equipment control software. Integration time can take months, and requires an extensive background in the SEMI standards. GEM4Tools requires no coding or detailed knowledge of the standards to implement any GEM capability. As an OPC client, it simply needs to be configured to communicate with your equipment controller’s OPC server.
GEM4Tools includes a starter application, which provides a basic graphical user interface that implements all GEM-required operator interactions; you can start GEM communications, set host control, upload/download recipes, and so on. Alternatively, you can embed GEM capabilities seamlessly into your system using a straightforward and flexible API that works in any COM-enabled environment. To extend your equipment’s capabilities beyond the GEM standard, you can also use the API to write custom services as needed.
In the field for over a decade and installed on over 500 tool instances, GEM4Tools is a stable and production proven application. Whether your equipment is used for single substrate or batch processing, metrology, or back-end processes, GEM4Tools delivers the functionality you need, efficiently and consistently.
GEM4Tools is built on three primary components, which simplify design and implementation, improve reliability, and reduce maintenance overhead.
The SECS communication driver provides the equipment-to-host interface, automatically managing all SECS-II messages and host communications required by the GEM services. GEM4Tools supports both the SECS-I and HSMS standards, for RS-232 serial or TCP/IP Ethernet® connectivity to the factory MES.
The SECS services communicate with the equipment’s OPC server and handle all messaging and logic as defined by the GEM standard. Each service corresponds to a GEM capability, and implements all scenarios defined for that capability.
If your equipment has functionality that goes beyond the GEM standard, you can use the GEM4Tools API to create your own custom services, in any COM-enabled (Component Object Model) language, including .NET.
The GEM4Tools database stores all GEM configuration and runtime information for the SECS services. It lets you quickly and easily characterize your equipment define the status variables, alarms, collection events, and equipment constants it supports. You can enable GEM capabilities, modify your equipment characterization, and change your SECS-I or HSMS communication parameters at any time, simply by updating the database.
GEM4Tools can be integrated into any solution built with COM-enabled languages, including .NET. All standard GEM capabilities are implemented as COM servers; developers simply use interfaces to the main COM object to let your applications start and manipulate GEM4Tools. With a straightforward API and plenty of code samples to draw upon, GEM4Tools is easy to integrate into your existing solution, whether you use an HMI package or have developed your own controller software.
Some factories require alternate or additional behavior to what is outlined in the GEM standard. If you need functionality beyond normal GEM capabilities, you can use the GEM4Tools API to extend the standard SECS services or create your own unique SECS services. Custom services can be used in your application like the standard GEM4Tools services.
With the convenience of the SECS services and a configurable database, standard GEM functionality is readily available. You can also create custom services that integrate seamlessly with the existing GEM4Tools package in order to satisfy equipment- or customer specific communication for your equipment.
COM architecture
Operating System Windows 2000, Windows XP (SP2) and Windows 7
Hardware Recommended hardware, RAM, and disk space for operating system
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