FAST 200 is the most advanced station control solution available today that was built specifically for 200mm IC Manufacturing fabrication facilities. With FAST 200, customers now have a path by which they can update their automation technology to take advantage of thin client station control functionality while preserving current investments in automation.

200mm Fab Automation

• Extensive library of pre-defined 200mm processing steps easily configured into base level 200mm operational scenarios
• Templates for extending base level processing steps to create customer specific library classes for implementing unique operational and manufacturing requirements
• Configurable Automation Adaptors to support the integration of FAST 200 to a wide range of fab applications including MES, EDC and Recipe Management systems
• Rich library of existing equipment models which minimize the time required for implementation of equipment connectivity
• Built upon Microsoft .NET, the standard for implementing and deploying mission critical applications