Interface A (EDA)
High-volume data for improving throughput and quality
Big data applications analyze high volumes of equipment-reported, real-time data to improve throughput and quality. While a regular GEM interface using SECS-II messaging supports data publication from the equipment, its primary purpose is to run tools without local operators present; data publication cannot interfere with remote control.
Equipment Data Acquisition (EDA) – also referred to as Interface A – provides high-rate data collection that addresses this need. The suite of SEMI standards that comprise EDA define an alternate channel for high-volume data publication from the tool to any EDA client/consumer, such as the factory host.
Communication between the equipment and its EDA clients is implemented over a well-defined XML/SOAP interface. Authenticated clients can request the data of interest, or interrogate the tools to see what data is available. To make it possible for EDA clients to gather data from any type of equipment, a Common Equipment Model (CEM) must be defined for each tool that provides a structured view of the equipment, its physical hardware and logical software components, and all the data that they can provide: objects, attributes (variables), events, and exceptions (alarms). This typically includes all the data mandated by the SEMI standards supported by the tool, as well as additional hardware or process-specific data such as sensor readings and processing results. EDA clients can then define custom Data Collection Plans to retrieve the equipment data that is relevant to them.
Occasionally, SEMI will create an EDA “freeze”, which defines the SEMI standards (and their versions) that should be used together to implement EDA functionality on a tool or in a fab.
- The initial 1105 freeze focused on communication between the tool and a client. It includes SEMI E120-1104, E125-1105, E132-1105, and E134-1105, which describe the XML/SOAP protocol and CEM modeling requirements.
- The 0710 freeze focused on the content transmitted between the tool and a client. Several new features were introduced, such as interface discovery, enhanced sessions, mapping SECS objects in EDA, and condition-based trace data collection. Support for SOAP 1.2 was added and metadata construction was simplified in order to reduce the number of XML messages used. This freeze includes SEMI E120-0310, E125-0710, E128-0710, E132-0310, E134-0710, and E138-0709.