SEMI E10: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
For both fabs and OEMs who wish to track the performance of their equipment, this standard codifies when and why a tool (or individual modules within it) can be in a particular state: Nonscheduled Time, Standby, Production, Maintenance, Engineering, Scheduled Downtime, and Unscheduled Downtime. A number of standard metrics can be calculated from this data, such as % Utilization and Mean Time Between Failures. These metrics can provide long term insight into the tool’s overall effectiveness and identify when a tool or component’s operations are going out of bounds. As an alternate to this standard, the SEMI E116 (EPT) standard provides a simpler model for tracking when a tool is in a Busy, Idle, or Blocked state.
The following PEER Group product supports this SEMI Standard: