SEMI E116: Specification for Equipment Performance Tracking
Tracks and reports equipment uptime vs. downtime in a straightforward way, without requiring any operator input. EPT determines whether the entire tool — or individual components, such as robots, load ports, process chambers – are either Busy (performing work), Idle (awaiting work), or Blocked (in an error condition). This data can be used by OEMs to identify areas where hardware performance or throughput can be improved, and by fabs to determine whether a tool is meeting its performance targets.
A number of our products support SEMI E116.