SEMI E120: Specification for the Common Equipment Model (CEM)
Specifies a consistent mechanism for modelling a piece of equipment with all its physical and logical components, so that it can be easily understood by the factory host. The physical components in a tool (e.g., LoadPorts, Process Chambers, Robots, Sensors) are organized into Modules, Subsystems, individual IO devices, and Material Locations; the logical components usually represent software modules used on the equipment (e.g., analysis engines, material managers).
This standard is part of the collection of standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.
A number of our products support SEMI E120.