SEMI E121: Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
Describes the best practices when setting up the XML schemas used to represent a tool and all its components that has been modelled as a SEMI E120 / SEMI E125 CEM. Communication with an EDA data consumer/client (such as the factory host) is implemented via an XML/SOAP based interface, as described in SEMI E128.
This guide is used by several standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.
A number of our products support SEMI E121.