SEMI E122: Specification for Tester Equipment Specific Equipment Model (TSEM)
This standard defines host interactions with testing tools that perform electrical tests on units, in addition to the normal GEM interface the equipment must support. A series of remote commands are available for the host to initiate and manage the testing activities on each virtual Tester in a piece of equipment. The standard describes in detail specific testing and data reporting scenarios, the data that must be reported when testing is complete (via standard variables, events, and pre-configured data log reports), process program requirements for configurable parameters when the recipe is selected, additional alarm management capabilities, and when different test activities and data logging are valid, based on the overall tool state.
A number of our products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.