SEMI E123: Specification for Handler Equipment Specific Equipment Model (HSEM)
This standard defines host interactions with Handler tools that are responsible for moving and processing units packaged on leadframes, trays, tubes, etc., in addition to the regular GEM interface the equipment must support. A series of remote commands are available for the host to initiate loading material from the input media to the process sites, processing of the material, then sorting the material based on processing results. The standard describes in detail the data that must be reported when processing is complete (via standard variables and events), requirements for process program content, the ability to support configurable machine, site, and media-specific parameters when the recipe is selected, additional recipe validation, and when different processing activities are valid, based on the overall tool state.
A number of our products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.