SEMI E125: Specification for Equipment Self Description (EqSD)
While GEM defines how the equipment can report its data to the host, it is often unclear where the data is coming from. The CEM for a tool is self-describing: it is clear how all the components within it relate to each other. This makes it easier to identify what data is relevant for manual troubleshooting, process control, or automated diagnostics applications. SEMI E125 further mandates what information must be supplied for the parameters (variable data), exceptions (alarms), or events published by each component, as well as any objects or state machines they support — either custom ones, or those required by other SEMI standards, such as the 300mm standards (SEMI E40, SEMI E87, SEMI E90, SEMI E94). This standard also describes how an EDA consumer/client can query this information from the tool.
A number of our products support SEMI E125.