SEMI E128: Specification for XML Message Structures
This standard specifies the XML/SOAP message structures that should be used when exchanging EDA data between a tool and any system that is interested in this data (such as the factory host). This includes establishing communications sessions, how requests for data should be structured, and the expected response structure from the tool.
This standard is part of the collection of standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.
A number of our products support SEMI E128.