SEMI E134: Specification for Data Collection Management
Because all equipment data is available through its self-describing Common Equipment Model (CEM), an EDA client can subscribe to the exact data it is interested in. This standard describes how EDA clients can set up Data Collection Plans (DCPs) that retrieve this information, either as trace data or event/alarm-based data. Once a DCPs is defined and activated, it can continuously collect data from the equipment; alternatively, EDA clients can request specific pieces of data on an as-needed basis. This standard includes detailed scenarios for managing DCPs and ensuring that equipment performance is not affected by the quantity of data being reported.
This standard is part of the collection of standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.
A number of our products support SEMI E134.