SEMI E138: Specification for XML Semiconductor Common Components
Describes the XML structure for representing errors and the parameter types, data types, and units for the actual data being reported by the equipment. Includes simple data types, mapping definitions between EDA and SECS-II data types, enumerations, and complex structure data types. Also specifies the acceptable XML schema file to use.
This standard is part of the collection of standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.
A number of our products support SEMI E138.