SEMI E145: Classification for Measurement Unit Symbols in XML
Describes the XML structure for representing units of measure, and lists the symbols to use for common measurement units, units sometimes used in semiconductor equipment, and rules for defining custom symbols that are unique to your equipment. Also specifies the acceptable XML schema file to use.
This guide is complimentary to the SEMI E125 standard, used by an EDA (Equipment Data Acquisition) implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.
A number of our products support SEMI E145.