SEMI E164: Specification for EDA Common Metadata
This standard is complimentary to the SEMI E125 standard, which outlines the XML format and metadata a tool can use to describe its CEM (Common Equipment Model), as specified in the SEMI E120 standard. SEMI E164 provides further guidelines on which data, events, state machines, and objects should be available through a tool’s EDA interface when it supports the GEM (SEMI E30), 300mm (SEMI E40, SEMI E87, SEMI E90, SEMI E94, SEMI E116), TS-Clock (SEMI E148), or Module Process Tracking (SEMI E157) standards. A consistent representation of this common data will allow EDA consumers/clients to create more generic data collection plans that should work across many different tool types, as long as the tool meets the SEMI E164 requirements.
A number of our products support SEMI E164.