SEMI E172: Specification for SECS Equipment Data Dictionary (SEDD)
This standard provides further guidelines on how to consistently define key elements of the SECS-II interface in an XML document, which is complimentary to the Host Interface documentation. SEMI E172 provides an XSD schema that imposes the document structure on how collection events, data variables, status variables, equipment constants, alarms, recipe variable parameters, and variable formats are defined. A consistent representation of this common data will help streamline the software development process for the fab.
A number of our products support SEMI E172.