SEMI E187: Specification for Cybersecurity of Fab Equipment
This specification defines overarching and fundamental cybersecurity requirements to help secure semiconductor manufacturing equipment. It defines requirements related to Windows and Linux operating system support, network security, endpoint protection, and security monitoring. Other SEMI cybersecurity standards can provide additional requirements to further improve equipment security.
This specification applies to semiconductor manufacturing equipment and automated material handling systems (AMHS). It does not currently apply to programmable logic controllers (PLCs), supervisory control and data acquisition (SCADA), or devices connected via sensor-actuator networks (e.g. PROFIBUS, MODBUS®, DeviceNet®).
Because this SEMI Standard relates to the entire tool or AMHS system, compliancy is the responsibility of the equipment manufacturer. Deploying modern software with PEER Group’s suite of SEMI-compliant OEM automation and connectivity products as part of the tool’s software stack allows for the expedited adoption of an overall cybersecurity software strategy.
PEER E187 Compliance Assessment
PEER Group offers a third-party service that provides OEMs with essential training, assessment, documentation, and guidance to help their equipment comply with SEMI Cybersecurity Standard E187.
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