SEMI E190: Specification for Equipment Data Publication (EDP)
Describes a framework for equipment suppliers to categorize equipment data for specific components and the minimum set of data for that component type. This Standard also defines the concept of shareable and non-shareable data and how it impacts data accessible from the computing device.
Subordinate Standards in this series define the implementation mapping of EDP Level Categories and required minimum set of data to specific EDP Component Types (e.g., Etch Components).
Because this SEMI Standard relates to content of data provided by the tool, compliancy is the responsibility of the equipment manufacturer. The equipment manufacturer needs to categorize equipment data accordingly.
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