SEMI E37: Specification for High-Speed SECS Message Services (HSMS) Generic Services

Defines an Ethernet (TCP/IP) communication handshake and transmission protocol. This is the customary communication channel between a factory host and all the equipment it must connect with, via SECS-II messaging. The standard describes connection and transaction procedures, as well as how communication failures should be handled. Once communication has been established, SECS-II messages can be exchanged between two entities.

A number of our products support SEMI E37.

Category Product Product capability Supported standards by this product
Equipment connectivity EIB® OEM SECS/GEM and GEM300 compliant communication framework Full list
GWGEM®Plus High-performance 64-bit GEM communications framework Full list
GWGEM® GEM communications framework Full list
ConX300™ GEM300 communications framework Full list
NexEDA™ EDA / Interface A add-on for ConX300 Full list
SDRPlus™ High-performance 64-bit SECS driver Full list
SDR™ 32-bit SECS driver Full list
Equipment automation PTO® Equipment automation and control framework Full list
Factory automation
EIB® Factory
Communications framework for connecting factory host systems to equipment Full list
FAST FW™ Station controller and equipment integration framework Full list
SDRPlus™ High-performance 64-bit SECS driver Full list
SDR™ 32-bit SECS driver Full list
PFSC™ Advanced equipment factory integration and station controller development platform Full list
EAF Rapid equipment connectivity and integration and seamless fab communications and data collection. Full list
Test applications PFAT™ Dynamic testing solution to ensure equipment meets factory requirements Full list
CCS Product Suite SECS/GEM compliance testing Full list
SECSIM Pro®+ Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications Full list
DiDaCT 2 Design and execute fab-approved test scenarios Full list