SEMI E4: Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
Defines a serial-based (RS-232) communication handshake and transmission protocol. Originally developed for host-to-tool interactions, it is more frequently encountered within a tool, where the equipment control software needs to communicate with individual hardware components via their SECS-I interface. This standard describes connection and transaction procedures, as well as how communication failures should be handled. Once communication has been established, SECS-II messages can be exchanged between two entities.
A number of our products support SEMI E4.