SEMI E40: Specification for Processing Management
Describes how Process Jobs can be used to initiate material processing on the equipment. A Process Job defines what material should be processed in the equipment, the order it should be processed in, and what Process Program (Recipe) should be used to process it. For tools that support process tuning, the factory host can specify recipe parameters as part of the job setup. Once a Process Job is defined, it can either start executing automatically once its material arrives at the tool and is available for processing, or the host can explicitly Start, Stop, Abort, Pause, or Resume the job. SEMI E40 Process Jobs are typically used in conjunction with SEMI E94 Control Jobs.
A number of our products support SEMI E40.