SEMI E5: Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
A dictionary of messages that can be exchanged between a factory host and a tool, once the communication connection protocol has been established via SEMI E4 or SEMI E37. Messages (or “Functions”) are organized into different “Streams” of related capabilities, such as communications, data publication, job management, recipe management, etc.
This standard describes in detail the required message structure, the data items used within each message, expected responses, and possible exception scenarios. Most other standards depend on SEMI E5, since they specify the SECS-II messages and data items they rely upon. While SEMI E5 defines hundreds of messages, a tool typically implements only the messages required by the standards it plans to support. Some fabs also request support for custom SECS-II messages, beyond those defined in SEMI E5.
A number of our products support SEMI E5.