SEMI E82: Specification for Interbay/Intrabay AMHS SEM (IBSEM)
This standard defines host interactions with AMHS transport mechanisms that are responsible for moving carriers between the various tools in the fab. A series of remote commands are available for the host to initiate transferring carriers between source and destination ports using an automated vehicle. The standard describes in detail specific transfer scenarios, the data (variables, events, and alarms) the tool must report, and the valid activities can take place for the AMHS a whole, its individual vehicles, ports, and the carriers being moved between them.
A number of our products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.