SEMI E84: Specification for Enhanced Carrier Handoff Parallel I/O Interface
Describes how automated carrier handoff should take place between the fab’s Automated Material Handling System (AMHS) and the equipment’s load ports, if using a SEMI E84 optical transducer (PIO). When the AMHS arrives at the tool, a series of optical signals are exchanged to confirm the tool is ready for carrier delivery or removal, then to track handoff progress and completion. Detailed scenarios prescribe the normal handoff sequence and acceptable responses to abnormal situations, defining all the signals and their usage. While the factory host is not directly responsible for the handoff sequence itself, it is triggered by the SEMI E87 material load/unload activities initiated by the host when a load port is operating in Auto mode.
A number of our products support SEMI E84.