SEMI E88: Specification for AMHS Storage SEM (Stocker SEM)
This standard defines host interactions with Stocker tools that provide long or short term storage for a number of carriers, in addition to the normal GEM interface the equipment must support. A series of remote commands are available for the host to initiate transferring carriers into, through, and out of the stocker via different input and output ports. The standard describes in detail specific transfer scenarios, the data (variables, events, and alarms) the tool must report, and the valid activities can take place for the stocker as a whole, its individual ports, stocker cranes, internal shelf locations, and the carriers being moved.
A number of our products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.