SEMI E90: Specification for Substrate Tracking
Once material has been successfully loaded onto a tool (typically following the SEMI E87 loading sequence), this standard describes how individual substrates are tracked as they move throughout the equipment. The equipment control software uses this information to ensure material safety as substrates are picked from/placed to their required locations. The host uses this information to determine the processing state of each substrate. Once material has completed processing, it can either be moved out of the tool or used in a subsequent processing request.
A number of our products support SEMI E90.