SEMI E91: Specification for Prober Specific Equipment Model (PSEM)
This standard defines host interactions with Prober testing tools that perform electrical measurements on substrates, in addition to the regular GEM interface the equipment must support. A series of remote commands are available for the host to initiate and manage the Prober jobs used to take these measurements. The standard describes in detail specific processing scenarios, the data that must be reported when inspection is complete, process program requirements, and when different Prober job activities are valid, based on the overall tool state.
A number of our products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.