SEMI E94: Specification for Control Job Management

This standard was developed to provide a supervisory level of control for Process Jobs, giving hosts the ability to manage complex or repetitive processing scenarios. Control Jobs can contain multiple Process Jobs, which can be run in a specific order or be optimized for material throughput. As Control Jobs are defined, they are added to a queue; when a job reaches the top of the queue, it can begin executing if its material has arrived at the equipment and is available for processing. The factory host can either change the queue order to move priority jobs to the head of the queue, or explicitly Start, Stop, Abort, Pause, or Resume the head-of-queue job. Once processing is complete, Control Jobs can specify alternate material routing based on a predetermined plan or in response to processing results.

A number of our products support SEMI E94.

Category Product Product capability Supported standards by this product
Equipment connectivity EIB® OEM SECS/GEM and GEM300 compliant communication framework Full list
ConX300™ GEM300 communications framework Full list
NexEDA™ EDA / Interface A add-on for ConX300 Full list
Equipment automation PTO® Equipment automation and control framework Full list
Factory automation
EIB® Factory
Communications framework for connecting factory host systems to equipment Full list
FAST FW™ Station controller and equipment integration framework Full list
PFSC™ Advanced equipment factory integration and station controller development platform Full list
EAF Rapid equipment connectivity and integration and seamless fab communications and data collection. Full list
Test applications PFAT™ Dynamic testing solution to ensure equipment meets factory requirements Full list
CCS Product Suite SECS/GEM compliance testing Full list
SECSIM Pro®+ Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications Full list
DiDaCT 2 Design and execute fab-approved test scenarios Full list