SEMI G84: Specification for Strip Map Protocol
Describes how the factory host and equipment can exchange strip map data through a standard SECS/GEM interface, using typical GEM event reports and SEMI E39 object requests (Stream 14 messages). Each strip map provides details about individual locations (units, cells, dies, etc.) on a substrate or strip, such as their processing or analysis results, grades, defect codes, or bin values.
A number of our products support SEMI G84.