SEMI PV2: Guide for PV Equipment Communication Interfaces (PVECI)
The GEM (SEMI E30) standard is the benchmark for factory-to-tool communication and control in semiconductor manufacturing, but can easily be applied to other industries. By adopting a common interface, factories and equipment suppliers alike can reduce their integration efforts and increase tool capabilities.
The SEMI PV2 standard is a scaled down version of SEMI E30, which outlines exact implementation details for the most common GEM capabilities that equipment must support. This includes specific formats for data items, a minimum list of required variables and events, process program management limited to unformatted recipes only, and more detailed clock management, similar to SEMI E148. Certain SECS-II messages described in SEMI E30 are also not required in a PV2 implementation.
A number of our products support SEMI PV2.