EDA / Interface A SEMI Standards

Standardized big data collection for improving throughput and quality

EDA / Interface A Standards (Freeze 1 and 2)

  • SEMI E120: Specification for the Common Equipment Model (CEM)
  • SEMI E125: Specification for Equipment Self Description (EqSD)
  • SEMI E132: Specification for Equipment Client Authentication and Authorization
  • SEMI E134: Specification for Data Collection Management
  • SEMI E138: Specification for XML Semiconductor Common Components

The Equipment Data Acquisition (EDA) – also referred to as Interface A – is a collection of SEMI Standards that provide high-rate data collection. EDA Standards define a separate channel for high-volume data publication from the tool to any EDA client/consumer, such as the factory host or analysis engines. Fabs then employ big data applications to analyze these high-volumes of equipment-reported, real-time data to improve throughput and quality.

While the equipment’s regular GEM interface using SECS-II messaging supports data publication from the equipment, its primary purpose is tool control. EDA Standards are used to improve data collection through a dedicated channel that does not interfere with SECS/GEM processes and functionality.

EDA Freeze

EDA Freeze Versions identify a specific set of SEMI Standards and versions that equipment suppliers and chip makers use as a unified set to implement the interface. To learn more about Freeze versions, read: What exactly is a SEMI “Freeze Version”?

Interface A / EDA-compliant communication and testing software

OEM

EDA communications for OEMs

EIB OEM
  • EDA / Interface A data collection capabilities for OEMs
Factory

EDA communications for factories

EIB Factory
  • Communications framework for connecting factory host systems to equipment in 200mm and 300mm semiconductor factories
PEER EDA Tuner
  • Collects real-time SEMI E120 CEM data in the EDA format

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