PFSC release history

Current release

Release information

Release Date:
March 19, 2020

What’s new in this release

This release provides building blocks to accelerate your station controller development and fully utilize PFSC™ capabilities. We’ve added a SECS/GEM station controller sample configuration for a deposition tool, complete with simulated factory systems (MES and RMS) and robust tool simulation. For each custom component in the sample configuration, we’ve included underlying source code and design artifacts along with a suite of documentation (Developer’s Guide, Getting Started Guide, API reference manual) to help you leverage this powerful automation platform for your station controller development. And, for those of you who learn visually, we’ve added to our library of PFSC instructional videos to help kick-start your station controller development.

Learn more about PFSC
Product overview
Product support
Log in to our secure video library to watch PFSC tutorials.