PEER Tool Orchestrator (PTO)
Take your tool from inception to production faster than with any other platform
PEER® Tool Orchestrator (PTO®) is an equipment automation and control framework with a GUI-based tool designer, PEER Tool Composer (PTC). Semiconductor OEMs use PTO to automate equipment.
Reduce your time to market and total cost of equipment ownership
PTO’s fully customizable and extensible framework simplifies the integration of your tools into varied production environments with exacting industry standards, making it ideal for OEMs in the Semiconductor, Solar, LED, and MEMS industries. Today, many high-technology factories (including virtually all 300mm semiconductor fabs) are operating production equipment running PTO.
You can manage all facets of your equipment design seamlessly using PTO’s GUI-based tool designer, PEER Tool Composer (PTC). With PTO’s dynamic collection of components that represent physical hardware and logical services, you can design and adapt your equipment control and visualizations quickly and effectively. Along with PTO’s other unique features, these capabilities let you quickly deploy automation software optimized for your specific tools.
Click the buttons below to see animated hardware and material movement in the PTO UI for different types of tools.
What makes PTO unique?
Using PTO as your common automation platform, you can leverage PTO’s flexibility to create a reliable, high-performance solution that matches the precise requirements of any highly automated tool. PTO’s flexible architecture and focus on rapid equipment design ensures that you can deliver your equipment to market on time and on budget.
Adaptive scheduling and material movement
Take advantage of PTO’s flexible scheduling infrastructure to create scheduling logic for any automation scenario using PTO’s pluggable algorithms or by customizing and integrating your own. With the ability to access tool and process-specific data to make tailored scheduling decisions and adaptive scheduling that adjusts dynamically to the state of the hardware, you can maximize both throughput and uptime for your tool.
Flexible material management
PTO’s flexible material management capabilities support multiple material types, such as production wafers, reticles, filler wafers, thin wafer holders, satellites, and Jedec trays, with full control over contextual data reporting for on-tool analysis or host communication. Information for each material type (i.e., home location, material lifetime) is defined through configuration, simplifying complex scheduling algorithms and material reconciliation scenarios.
Tailored vacuum control
Create custom vacuum control sequences to exactly match the vacuum schematic of your tool by defining workflows from within the PTC designer. Execute vacuum commands during fully automated, manual, or maintenance processes.
Targeted supervisory control
Full host connectivity capabilities are built into PTO based on its integration with PEER Group’s EIB® (Equipment Information Bridge) connectivity product. Integrate seamlessly with factory systems by tailoring equipment communications, including SECS/GEM (E30), GEM300 (300mm communications), Equipment Data Acquisition (EDA), or other non-standard communication protocols. As factory automation requirements evolve, you can scale your solution to support different host communication standards.
Rapid hardware integration
PTO’s extensible hardware interoperability framework enables plug ‘n play exchange of a large collection of field-proven drivers for all major commercial hardware, including robots, aligners, load ports, VCEs, pumps, valves, gauges, PLCs, I/O blocks, and so on. PTO also facilitates rapid development and integration of custom hardware components.
A flexible software interlock infrastructure works alongside existing hardware interlocks, letting you assemble and order the interlock rules you want to apply to any hardware action without writing any code.
Dynamic recipe management
PTO’s recipe management capabilities let you create and manage recipes designed for any type of tool; from simple, single-chamber recipes to complex flow recipes with reusable modules.
Modular GUI framework
Use PTO’s modular GUI framework and HMI designer to create tool-specific and standards-based screens that can be used on-tool or from remote locations.
- Create graphical status and control screens easily, without coding, using custom screen regions and visualization widgets.
- Re-theme GUIs to meet your corporate presentation standards.
Powerful data reporting and analysis
PTO’s data collection capabilities and customized displays let you chart and analyze your equipment status in real time or review performance trends using historical data. Visually navigate the time-series data generated by your tool to focus on the data of interest. For example, take a deeper look into your equipment’s operational uptime data to help you understand your tool’s overall equipment effectiveness (OEE). PTO leverages the fast, scalable data management capabilities of our EIB® connectivity product to collect high-frequency, high-volume data and store it in a fraction of the space needed from traditional solutions. This infrastructure makes PTO ideal for all of your data management needs, even as your system of record.
Seamless release management
PTO’s flexible release management features let you manage tool configurations efficiently at both the tool platform and individual tool level. PTO can support deployment and software upgrade scenarios spanning the lifecycle of a tool—from tool design in the lab to in-field equipment integration to full factory deployment.
PTO’s configurable, role-based security ensures that you have complete control over the accessibility and capabilities available to each user, whether they be a process engineer, operator or tool owner. GUI screens can adjust their appearance and capabilities dynamically based on security settings. PTO’s server environment verifies credentials before allowing any remote command to execute.
PTO’s modular hardware and service components are organized into layers that provide incremental levels of functionality, from the minutiae of protocol-specific commands for individual hardware elements to the high-level requirements for job execution and host communications. Your solution can take advantage of this modular approach—use PTO’s fully developed, out-of-the-box tool components or augment with custom components for your tool’s specific needs. With a flexible architecture built using the widely accepted .NET platform, PTO can be adapted and extended to fit the unique needs of any tool while still taking advantage of a common framework and proven, standardized components.
PTO’s family of product offerings can meet the automation needs of different tool types and processing scenarios. Choose the version that suits your current needs, and as production requirements for your equipment grow, take advantage of additional capabilities by migrating to a different version of PTO.
- PTO 300: For tools that need to communicate with a factory host and manage automated material hand-off, job execution, and equipment states based on the 300mm SEMI standards. PTO 300 includes full support for cluster tools. An E30 adaptor can be included for tools also running in older fabs.
- PTO 200/PV: For tools where factory host communication is based on the E30 GEM standard (200mm, photovoltaic, assembly, etc.), this is the best solution for tools deployed in fabs with simple factory automation needs. PTO 200/PV includes full support for cluster tools, provides a competitive price point and can be upgraded seamlessly to PTO 300.
- PTO BenchTop: For tools without factory automation requirements or EFEM hardware integration. PTO BenchTop relies on PTO’s robust infrastructure to provide basic manual control capabilities and to co‑ordinate wafer processing. A complete user interface is provided.
Turnkey, SDK, or hybrid solution?
PTO’s flexibility extends beyond the software itself. Partner with PEER Group and discover our flexible approach to integration services that will ensure the success of your automation solution.
Experience PTO in action
Try a fully functioning evaluation of PTO that lets you explore its dynamic runtime capabilities.
- Realistic, feature-rich sample tool configurations demonstrate how PTO can be used with a wide variety of equipment, including simulated hardware components that let you “run” these samples like real tools or try PTO on your own equipment.
- Discover PTC’s rich configuration options, which let you change equipment behavior at run-time instead of writing custom code.
- Explore PTO’s wide selection of standard GUI screens for monitoring and controlling equipment.
- See first-hand how you can extend the PTO framework by exploring the numerous code extension and workflow samples.
Contact PEER Group sales for a demonstration of PTO or to arrange a product evaluation.