Adaptive scheduling and material movement
Take advantage of PTO’s flexible scheduling infrastructure to create scheduling logic for any automation scenario using PTO’s pluggable algorithms or by customizing and integrating your own. With the ability to access tool and process-specific data to make tailored scheduling decisions and adaptive scheduling that adjusts dynamically to the state of the hardware, you can maximize both throughput and uptime for your tool.
Flexible material management
PTO’s flexible material management capabilities support multiple material types, such as production wafers, reticles, filler wafers, thin wafer holders, satellites, and Jedec trays, with full control over contextual data reporting for on-tool analysis or host communication. Information for each material type (i.e., home location, material lifetime) is defined through configuration, simplifying complex scheduling algorithms and material reconciliation scenarios.
Tailored vacuum control
Create custom vacuum control sequences to exactly match the vacuum schematic of your tool by defining workflows from within the PTC designer. Execute vacuum commands during fully automated, manual, or maintenance processes.
Targeted supervisory control
Full host connectivity capabilities are built into PTO based on its integration with PEER Group’s EIB® (Equipment Information Bridge) connectivity product. Integrate seamlessly with factory systems by tailoring equipment communications, including SECS/GEM (E30), GEM300 (300mm communications), Equipment Data Acquisition (EDA), or other non-standard communication protocols. As factory automation requirements evolve, you can scale your solution to support different host communication standards.
Rapid hardware integration
PTO’s extensible hardware interoperability framework enables plug ‘n play exchange of a large collection of field-proven drivers for all major commercial hardware, including robots, aligners, load ports, VCEs, pumps, valves, gauges, PLCs, I/O blocks, and so on. PTO also facilitates rapid development and integration of custom hardware components.
A flexible software interlock infrastructure works alongside existing hardware interlocks, letting you assemble and order the interlock rules you want to apply to any hardware action without writing any code.
Dynamic recipe management
PTO’s recipe management capabilities let you create and manage recipes designed for any type of tool; from simple, single-chamber recipes to complex flow recipes with reusable modules.
Modular GUI framework
Use PTO’s modular GUI framework and HMI designer to create tool-specific and standards-based screens that can be used on-tool or from remote locations.
- Create graphical status and control screens easily, without coding, using custom screen regions and visualization widgets.
- Re-theme GUIs to meet your corporate presentation standards.
Powerful data reporting and analysis
PTO’s data collection capabilities and customized displays let you chart and analyze your equipment status in real time or review performance trends using historical data. Visually navigate the time-series data generated by your tool to focus on the data of interest. For example, take a deeper look into your equipment’s operational uptime data to help you understand your tool’s overall equipment effectiveness (OEE). PTO leverages the fast, scalable data management capabilities of our EIB® connectivity product to collect high-frequency, high-volume data and store it in a fraction of the space needed from traditional solutions. This infrastructure makes PTO ideal for all of your data management needs, even as your system of record.
Learn how the data broker capabilities in PTO’s underlying connectivity framework (EIB® OEM) can help you consolidate your data.
Seamless release management
PTO’s flexible release management features let you manage tool configurations efficiently at both the tool platform and individual tool level. PTO can support deployment and software upgrade scenarios spanning the lifecycle of a tool—from tool design in the lab to in-field equipment integration to full factory deployment.
PTO’s configurable, role-based security ensures that you have complete control over the accessibility and capabilities available to each user, whether they be a process engineer, operator or tool owner. GUI screens can adjust their appearance and capabilities dynamically based on security settings. PTO’s server environment verifies credentials before allowing any remote command to execute.