Definitions of SEMI Standards

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Definitions of SEMI Standards

To learn about any particular SEMI Standard and which PEER Group products support it, click a link below.

SEMI® provides several complimentary files (Schema and WSDL files, requirements, examples, etc.) that augment various SEMI Standards. You can download these complimentary files at semi.org.

SEMI E4: SECS-I

Defines a serial-based (RS-232) communication handshake and transmission protocol. Originally developed for host-to-tool interactions, it is more frequently encountered within a tool, where the equipment control software needs to communicate with individual hardware components via their SECS-I interface. This standard describes connection and transaction procedures, as well as how communication failures should be handled. Once communication has been established, SECS-II messages can be exchanged between two entities.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

GWGEM® – SECS/GEM equipment connectivity software for Windows, Linux and Solaris
GWGEM supports several SEMI Standards; see the full list.

SDR™ – SECS driver for implementing SECS-I and SECS-II communications for Windows, Linux and Solaris
SDR supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E5: SECS-II

A dictionary of messages that can be exchanged between a factory host and a tool, once the communication connection protocol has been established via SEMI E4 or SEMI E37. Messages (or “Functions”) are organized into different “Streams” of related capabilities, such as communications, data publication, job management, recipe management, etc.

This standard describes in detail the required message structure, the data items used within each message, expected responses, and possible exception scenarios. Most other standards depend on SEMI E5, since they specify the SECS-II messages and data items they rely upon. While SEMI E5 defines hundreds of messages, a tool typically implements only the messages required by the standards it plans to support. Some fabs also request support for custom SECS-II messages, beyond those defined in SEMI E5.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

GWGEM® – SECS/GEM equipment connectivity software for Windows, Linux and Solaris
GWGEM supports several SEMI Standards; see the full list.

SDRPlus™ – High-performance 64-bit SECS driver for implementing SECS-II communications for Windows or Linux
SDRPlus supports several SEMI Standards; see the full list.

SDR™ – SECS driver for implementing SECS-I and SECS-II communications for Windows, Linux and Solaris
SDR supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E10: Equipment Reliability, Availability, Maintainability, and Utilization

For both fabs and OEMs who wish to track the performance of their equipment, this standard codifies when and why a tool (or individual modules within it) can be in a particular state: Nonscheduled Time, Standby, Production, Maintenance, Engineering, Scheduled Downtime, and Unscheduled Downtime. A number of standard metrics can be calculated from this data, such as % Utilization and Mean Time Between Failures. These metrics can provide long term insight into the tool’s overall effectiveness and identify when a tool or component’s operations are going out of bounds. As an alternate to this standard, the SEMI E116 (EPT) standard provides a simpler model for tracking when a tool is in a Busy, Idle, or Blocked state.


The following PEER Group product supports this SEMI Standard:

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

SEMI E30: GEM (Generic Equipment Model)

This is the golden standard for host-to-equipment communication, describing many of the basic capabilities that fabs expect tools to support:

  • Establishing communications correctly with the factory host.
  • Determining who has control of the tool: the remote host or local operator.
  • Reporting of sensor data, state information, and processing results from the tool through Status Variables or Data Variables.
  • Raising Events to report on relevant equipment activities and Alarms to notify the host when an error scenario occurs.
  • Allowing the host to change equipment functionality by setting Equipment Constants.
  • Responding to Remote Commands sent by the host, for process control and material movement.
  • Host management of the library of Process Programs (recipes) on the equipment.

Other capabilities may be required by the fab as well, such as clock (time) management, a terminal view for local operators to send messages to host personnel, reporting on material movement, spooling SECS-II messages while communications are down, and monitoring trace data reported by the equipment.  While subsequent standards describe more sophisticated material handling and production control scenarios, they all rely upon the core capabilities described in SEMI E30, particularly alarm, event, and data publication.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

GWGEM® – SECS/GEM equipment connectivity software for Windows, Linux and Solaris
GWGEM supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E37: HSMS (High Speed Message Service)

Defines an Ethernet (TCP/IP) communication handshake and transmission protocol. This is the customary communication channel between a factory host and all the equipment it must connect with, via SECS-II messaging. The standard describes connection and transaction procedures, as well as how communication failures should be handled. Once communication has been established, SECS-II messages can be exchanged between two entities.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards, see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

GWGEM® – SECS/GEM equipment connectivity software for Windows, Linux and Solaris
GWGEM supports several SEMI Standards; see the full list.

SDRPlus™ – High-performance 64-bit SECS driver for implementing SECS-II communications for Windows or Linux
SDRPlus supports several SEMI Standards; see the full list.

SDR™ – SECS driver for implementing SECS-I and SECS-II communications for Windows, Linux and Solaris
SDR supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards, see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E39: Object Services

Provides the infrastructure for creating and deleting various kinds of “objects,” as well as querying or updating their attributes. This standard is leveraged by many newer standards, such as SEMI E87 (Carriers), SEMI E94 (Control Jobs), and SEMI E148 (TS-Clock), which need to represent many physical or logical components on the equipment, have sophisticated data requirements, and mandate specific behaviors or state models for each object instance. While some standards rely upon service-specific messages to interact with their objects, the generic Stream 14 Object Services messages described in this standard are often used instead.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E40: Process Job Management

Describes how Process Jobs can be used to initiate material processing on the equipment. A Process Job defines what material should be processed in the equipment, the order it should be processed in, and what Process Program (Recipe) should be used to process it. For tools that support process tuning, the factory host can specify recipe parameters as part of the job setup. Once a Process Job is defined, it can either start executing automatically once its material arrives at the tool and is available for processing, or the host can explicitly Start, Stop, Abort, Pause, or Resume the job. SEMI E40 Process Jobs are typically used in conjunction with SEMI E94 Control Jobs.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E82: Interbay/Intrabay AMHS SEM

This standard defines host interactions with AMHS transport mechanisms that are responsible for moving carriers between the various tools in the fab.  A series of remote commands are available for the host to initiate transferring carriers between source and destination ports using an automated vehicle. The standard describes in detail specific transfer scenarios, the data (variables, events, and alarms) the tool must report, and the valid activities can take place for the AMHS a whole, its individual vehicles, ports, and the carriers being moved between them.


Our EIB® OEM, EIB® GEM, and EIB® 300 products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

SEMI E84: Carrier Handoff

Describes how automated carrier handoff should take place between the fab’s Automated Material Handling System (AMHS) and the equipment’s load ports, if using a SEMI E84 optical transducer (PIO). When the AMHS arrives at the tool, a series of optical signals are exchanged to confirm the tool is ready for carrier delivery or removal, then to track handoff progress and completion. Detailed scenarios prescribe the normal handoff sequence and acceptable responses to abnormal situations, defining all the signals and their usage. While the factory host is not directly responsible for the handoff sequence itself, it is triggered by the SEMI E87 material load/unload activities initiated by the host when a load port is operating in Auto mode.


Several of our products support this SEMI Standard.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E87: Carrier Management

Automated material management is critical for lights-out host control in a fabrication facility. This standard provides detailed guidelines for many different material handling variations and error scenarios that may occur. The carrier loading/unloading sequence can be initiated by the local operator or by the factory host through a series of Stream 3 messages. Substrates (wafers) can only be accessed for processing once the carrier holding them has been successfully loaded, and its CarrierID and slot map read and validated. Typically, once processing is complete, material is returned to its carrier, which can then be unloaded or used in subsequent processing requests. To ensure operator, material, and hardware safety, load port and carrier states are monitored closely and are used to orchestrate these complex handoff procedures. Learn more about SEMI E87 CRTU Prediction.

The SEMI E87 standard was designed to accommodate both Fixed Buffer tools (substrates are removed directly from carriers on external load ports) and Internal Buffer tools (carriers are brought into storage locations inside the tool before substrate access can begin). The standard can also be used whether material is delivered to the equipment by an operator, or via an Automated Material Handling System (AMHS), as described in SEMI E84.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E88: Stocker SEM

This standard defines host interactions with Stocker tools that provide long or short term storage for a number of carriers, in addition to the normal GEM interface the equipment must support. A series of remote commands are available for the host to initiate transferring carriers into, through, and out of the stocker via different input and output ports. The standard describes in detail specific transfer scenarios, the data (variables, events, and alarms) the tool must report, and the valid activities can take place for the stocker as a whole, its individual ports, stocker cranes, internal shelf locations, and the carriers being moved.


Our EIB® OEM, EIB® GEM, and EIB® 300 products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

SEMI E90: Substrate Management

Once material has been successfully loaded onto a tool (typically following the SEMI E87 loading sequence), this standard describes how individual substrates are tracked as they move throughout the equipment. The equipment control software uses this information to ensure material safety as substrates are picked from/placed to their required locations. The host uses this information to determine the processing state of each substrate. Once material has completed processing and has moved to its final destination, it can either be moved out of the tool or used in a subsequent processing request.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E91: Prober SEM

This standard defines host interactions with Prober testing tools that perform electrical measurements on substrates, in addition to the regular GEM interface the equipment must support. A series of remote commands are available for the host to initiate and manage the Prober jobs used to take these measurements. The standard describes in detail specific processing scenarios, the data that must be reported when inspection is complete, process program requirements, and when different Prober job activities are valid, based on the overall tool state.


Our EIB® OEM, EIB® GEM, and EIB® 300 products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

SEMI E94: Control Job Management

This standard was developed to provide a supervisory level of control for Process Jobs, giving hosts the ability to manage complex or repetitive processing scenarios. Control Jobs can contain multiple Process Jobs, which can be run in a specific order or be optimized for material throughput. As Control Jobs are defined, they are added to a queue; when a job reaches the top of the queue, it can begin executing if its material has arrived at the equipment and is available for processing. The factory host can either change the queue order to move priority jobs to the head of the queue, or explicitly Start, Stop, Abort, Pause, or Resume the head-of-queue job. Once processing is complete, Control Jobs can specify alternate material routing based on a predetermined plan or in response to processing results.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

PFAT™ – Dynamic testing solution for validating equipment automation software
PFAT supports several SEMI Standards; see the full list.

SECSIM Pro®+ – Factory host and equipment simulator for testing SECS/GEM and GEM300 equipment communications
SECSIM Pro+ supports several SEMI Standards; see the full list.

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

DiDaCT – Test application combining SEMI E84 testing with SECS message communications
DiDaCT supports several SEMI Standards; see the full list.

SEMI E109: Reticle and Pod Management

Similar to SEMI E87, this standard describes the additional automated material handling scenarios that lithography, reticle inspection, and reticle stocker tools need to manage Pods (carriers) and the Reticles (substrates) within them. In addition to the typical loading/unloading scenarios for Fixed Buffer and Internal Buffer tools described by SEMI E87, SEMI E109 also encompasses locking and unlocking of pods. Once the pod loading sequence has completed successfully, reticles can be move through the tool via TransferJobs or explicit move instructions. Extra inspection and qualification data gathered for each reticle determines how long it may be used in production.


The following PEER Group product supports this SEMI Standard:

Connectivity

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

SEMI E116: Equipment Performance Tracking (EPT)

Tracks and reports equipment uptime vs. downtime in a straight-forward way, without requiring any operator input. EPT determines whether the entire tool — or individual components, such as robots, load ports, process chambers – are either Busy (performing work), Idle (awaiting work), or Blocked (in an error condition). This data can be used by OEMs to identify areas where hardware performance or throughput can be improved, and by fabs to determine whether a tool is meeting its performance targets.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

ConX300™ – GEM300 equipment connectivity software for Windows and Linux
ConX300 supports several SEMI Standards; see the full list.

NexEDA™ – GEM300 (300mm) equipment connectivity with EDA
NexEDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Test applications

CCS Product Suite – SEMI equipment automation standards testing
CCS Product Suite supports several SEMI Standards; see the full list.

SEMI E120: Common Equipment Model (CEM)

Specifies a consistent mechanism for modelling a piece of equipment with all its physical and logical components, so that it can be easily understood by the factory host. The physical components in a tool (e.g., LoadPorts, Process Chambers, Robots, Sensors) are organized into Modules, Subsystems, individual IO devices, and Material Locations; the logical components usually represent software modules used on the equipment (e.g., analysis engines, material managers).

This standard is part of the collection of standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® EDA – EDA 1105, 0710 with SEMI E164 factory connectivity software for equipment
EIB EDA supports several SEMI Standards; see the full list.

portA™ – EDA 1105, 0710 factory connectivity software for equipment using Linux and Solaris
portA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Factory automation

PEER® EDA Tuner™ – Enables factories to collect EDA data from their equipment
PEER EDA Tuner supports several SEMI Standards; see the full list.

SEMI E121: XML Usage

Describes the best practices when setting up the XML schemas used to represent a tool and all its components that has been modelled as a SEMI E120 / SEMI E125 CEM. Communication with an EDA data consumer/client (such as the factory host) is implemented via an XML/SOAP based interface, as described in SEMI E128.

This guide is used by several standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® EDA – EDA 1105, 0710 with SEMI E164 factory connectivity software for equipment
EIB EDA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Factory automation

PEER® EDA Tuner™ – Enables factories to collect EDA data from their equipment
PEER EDA Tuner supports several SEMI Standards; see the full list.

SEMI E122: Tester SEM

This standard defines host interactions with testing tools that perform electrical tests on units, in addition to the normal GEM interface the equipment must support. A series of remote commands are available for the host to initiate and manage the testing activities on each virtual Tester in a piece of equipment. The standard describes in detail specific testing and data reporting scenarios, the data that must be reported when testing is complete (via standard variables, events, and pre-configured data log reports), process program requirements for configurable parameters when the recipe is selected, additional alarm management capabilities, and when different test activities and data logging are valid, based on the overall tool state.


Our EIB® OEM, EIB® GEM, and EIB® 300 products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

SEMI E123: Handler SEM

This standard defines host interactions with Handler tools that are responsible for moving and processing units packaged on leadframes, trays, tubes, etc., in addition to the regular GEM interface the equipment must support. A series of remote commands are available for the host to initiate loading material from the input media to the process sites, processing of the material, then sorting the material based on processing results. The standard describes in detail the data that must be reported when processing is complete (via standard variables and events), requirements for process program content, the ability to support configurable machine, site, and media-specific parameters when the recipe is selected, additional recipe validation, and when different processing activities are valid, based on the overall tool state.


Our EIB® OEM, EIB® GEM, and EIB® 300 products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® GEM – SECS/GEM and PV2 factory connectivity software for equipment
EIB GEM supports several SEMI Standards; see the full list.

EIB® 300 – GEM300 factory connectivity software for equipment
EIB 300 supports several SEMI Standards; see the full list.

SEMI E125: Equipment Self-Description

While GEM defines how the equipment can report its data to the host, it is often unclear where the data is coming from. The CEM for a tool is self-describing: it is clear how all the components within it relate to each other. This makes it easier to identify what data is relevant for manual troubleshooting, process control, or automated diagnostics applications. SEMI E125 further mandates what information must be supplied for the parameters (variable data), exceptions (alarms), or events published by each component, as well as any objects or state machines they support — either custom ones, or those required by other SEMI standards, such as the 300mm standards (SEMI E40, SEMI E87, SEMI E90, SEMI E94). This standard also describes how an EDA consumer/client can query this information from the tool.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® EDA – EDA 1105, 0710 with SEMI E164 factory connectivity software for equipment
EIB EDA supports several SEMI Standards; see the full list.

portA™ – EDA 1105, 0710 factory connectivity software for equipment using Linux and Solaris
portA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Factory automation

PEER® EDA Tuner™ – Enables factories to collect EDA data from their equipment
PEER EDA Tuner supports several SEMI Standards; see the full list.

SEMI E128: XML Message Structures

This standard specifies the XML/SOAP message structures that should be used when exchanging EDA data between a tool and any system that is interested in this data (such as the factory host).  This includes establishing communications sessions, how requests for data should be structured, and the expected response structure from the tool.

This standard is part of the collection of standards that make up an EDA (Equipment Data Acquisition) or “Interface A” implementation. EDA is an alternate channel that equipment can use to publish data to any EDA data consumer/client such as the factory host, without using the SECS/GEM (SEMI E5 and SEMI E30) messaging infrastructure.


Several of our products support this SEMI Standard.

Connectivity

EIB® OEM – SECS/GEM, EDA, and GEM300 factory connectivity software for equipment
EIB OEM supports several SEMI Standards; see the full list.

EIB® EDA – EDA 1105, 0710 with SEMI E164 factory connectivity software for equipment
EIB EDA supports several SEMI Standards; see the full list.

portA™ – EDA 1105, 0710 factory connectivity software for equipment using Linux and Solaris
portA supports several SEMI Standards; see the full list.

Tool automation

PTO® – Tool automation & control software
PTO supports several SEMI Standards; see the full list.

Factory automation

PEER® EDA Tuner™ – Enables factories to collect EDA data from their equipment
PEER EDA Tuner supports several SEMI Standards; see the full list.

SEMI E130: 300mm Prober CEM

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