SEMI Standards product support

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Supported SEMI Standards by product

Click a product below to learn which SEMI Standards it supports. From these lists, click a link to learn more about any particular SEMI Standard.

Please note: we are active on various SEMI automation standards committees, and we review all updates to the standards as they are published. Whenever we release a new version of a PEER Group product, we specify compliance to specific versions of the SEMI standards. Your product version might also support later versions of a SEMI standard since many updates to the standards are editorial, part of a regular 5-year renewal cycle, or have no effect on your product’s functionality. To inquire about support for more recent versions of any SEMI standard, please contact our technical support team through our secure customer support portal.

EIB® OEM

EIB OEM – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management
SEMI E116	Equipment Performance Tracking (EPT)
SEMI E120	Common Equipment Model (CEM)
SEMI E121	XML Usage
SEMI E125	Equipment Self-Description
SEMI E128	XML Message Structures
SEMI E132	Client Authentication and Authorization
SEMI E134	Data Collection Management
SEMI E138	XML Common Components
SEMI E142	Substrate Mapping
SEMI E145	Measurement Unit Symbols in XML
SEMI E148	TS-Clock
SEMI E157	Module Process Tracking
SEMI E164	EDA Common Metadata
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI E173	XML SECS-II Message Notation
SEMI A3	Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI PV2	PV Equipment Communication Interfaces (PVECI)
SEMI G84	Strip Map Protocol
EDA	EDA Freeze 1105 and 0710

The following SEMI Standards can be supported in EIB® OEM but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.

SEMI E82	Interbay/Intrabay AMHS SEM
SEMI E88	Stocker SEM
SEMI E91	Prober SEM
SEMI E122	Tester SEM
SEMI E123	Handler SEM
SEMI E130	300mm Prober CEM

Learn more about EIB OEM

EIB® GEM

EIB GEM – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E142	Substrate Mapping
SEMI E148	TS-Clock
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI E173	XML SECS-II Message Notation
SEMI A3	Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI PV2	PV Equipment Communication Interfaces (PVECI)
SEMI G84	Strip Map Protocol

The following SEMI Standards can be supported in EIB® GEM but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.

SEMI E82	Interbay/Intrabay AMHS SEM
SEMI E88	Stocker SEM
SEMI E91	Prober SEM
SEMI E122	Tester SEM
SEMI E123	Handler SEM
SEMI E130	300mm Prober CEM

Learn more about EIB GEM

EIB® EDA

EIB EDA – Supported SEMI Standards

SEMI E120	Common Equipment Model (CEM)
SEMI E121	XML Usage
SEMI E125	Equipment Self-Description
SEMI E128	XML Message Structures
SEMI E132	Client Authentication and Authorization
SEMI E134	Data Collection Management
SEMI E138	XML Common Components
SEMI E145	Measurement Unit Symbols in XML
SEMI E164	EDA Common Metadata
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI E173	XML SECS-II Message Notation
SEMI A3	Printed Circuit Board Equipment Communication Interfaces (PCBECI)
EDA	EDA Freeze 1105 and 0710

Learn more about EIB EDA

EIB® 300

EIB 300 – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management
SEMI E116	Equipment Performance Tracking (EPT)
SEMI E142	Substrate Mapping
SEMI E148	TS-Clock
SEMI E157	Module Process Tracking
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI E173	XML SECS-II Message Notation
SEMI A3	Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI PV2	PV Equipment Communication Interfaces (PVECI)
SEMI G84	Strip Map Protocol

The following SEMI Standards can be supported in EIB® 300 but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.

SEMI E82	Interbay/Intrabay AMHS SEM
SEMI E88	Stocker SEM
SEMI E91	Prober SEM
SEMI E122	Tester SEM
SEMI E123	Handler SEM
SEMI E130	300mm Prober CEM

Learn more about EIB 300

ConX300™

ConX300 – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management
SEMI E109	Reticle and Pod Management
SEMI E116	Equipment Performance Tracking (EPT)
SEMI E148	TS-Clock
SEMI E157	Module Process Tracking
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI PV2	PV Equipment Communication Interfaces (PVECI)

Learn more about ConX300

GWGEM®

GWGEM – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI PV2	PV Equipment Communication Interfaces (PVECI)

Learn more about GWGEM

SDR™

SDR – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E37	HSMS (High Speed Message Service)

Learn more about SDR

portA™

portA – Supported SEMI Standards

SEMI E120	Common Equipment Model (CEM)
SEMI E125	Equipment Self-Description
SEMI E128	XML Message Structures
SEMI E132	Client Authentication and Authorization
SEMI E134	Data Collection Management
SEMI E138	XML Common Components
SEMI E145	Classification for Measurement Unit Symbols in XML
EDA	EDA Freeze 1105 and 0710

Learn more about portA

NexEDA™

NexEDA – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management
SEMI E109	Reticle and Pod Management
SEMI E116	Equipment Performance Tracking (EPT)
SEMI E148	TS-Clock
SEMI E157	Module Process Tracking
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI PV2	PV Equipment Communication Interfaces (PVECI)

Learn more about NexEDA

PTO®

PTO – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E10	Equipment Reliability, Availability, Maintainability, and Utilization
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E84	Carrier Handoff
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management
SEMI E116	Equipment Performance Tracking (EPT)
SEMI E120	Common Equipment Model (CEM)
SEMI E121	XML Usage
SEMI E125	Equipment Self-Description
SEMI E128	XML Message Structures
SEMI E132	Client Authentication and Authorization
SEMI E134	Data Collection Management
SEMI E138	XML Common Components
SEMI E142	Substrate Mapping
SEMI E145	Measurement Unit Symbols in XML
SEMI E148	TS-Clock
SEMI E157	Module Process Tracking
SEMI E164	EDA Common Metadata
SEMI E172	SECS Equipment Data Dictionary (SEDD)
SEMI PV2	PV Equipment Communication Interfaces (PVECI)
SEMI G84	Strip Map Protocol
EDA	EDA Freeze 1105 and 0710

Learn more about PTO

PFAT™

PFAT – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E84	Carrier Handoff
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management

Learn more about PFAT

SECSIM Pro®+

SECSIM Pro+ – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management

Learn more about SECSIM Pro+

CCS Product Suite

CCS Product Suite – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E40	Process Job Management
SEMI E84	Carrier Handoff
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management
SEMI E116	Equipment Performance Tracking (EPT)

Learn more about CCS Product Suite

DiDaCT

DiDaCT – Supported SEMI Standards

SEMI E4	SECS-I
SEMI E5	SECS-II
SEMI E30	GEM (Generic Equipment Model)
SEMI E37	HSMS (High Speed Message Service)
SEMI E39	Object Services
SEMI E40	Process Job Management
SEMI E84	Carrier Handoff
SEMI E87	Carrier Management
SEMI E90	Substrate Management
SEMI E94	Control Job Management
SEMI PV2	PV Equipment Communication Interfaces (PVECI)

Learn more about DiDaCT

PEER® EDA Tuner™

PEER EDA Tuner – Supported SEMI Standards

SEMI E120	Common Equipment Model (CEM)
SEMI E121	XML Usage
SEMI E125	Equipment Self-Description
SEMI E128	XML Message Structures
SEMI E132	Client Authentication and Authorization
SEMI E134	Data Collection Management
SEMI E138	XML Common Components
SEMI E145	Measurement Unit Symbols in XML
SEMI E164	EDA Common Metadata
EDA	EDA Freeze 1105 and 0710