SEMI Standards product support

Supported SEMI Standards by product

Click a product below to learn which SEMI Standards it supports. From these lists, click a link to learn more about any particular SEMI Standard.

EIB OEM – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E142 Substrate Mapping
SEMI E145 Measurement Unit Symbols in XML
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E164 EDA Common Metadata
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol
EDA EDA Freeze 1105 and 0710
Supported SEMI Standards through configuration:
SEMI E82 Interbay/Intrabay AMHS SEM
SEMI E88 Stocker SEM
SEMI E91 Prober SEM
SEMI E122 Tester SEM
SEMI E123 Handler SEM
SEMI E130 300mm Prober CEM

Learn more about EIB OEM

EIB GEM – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E142 Substrate Mapping
SEMI E148 TS-Clock
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol
Supported SEMI Standards through configuration:
SEMI E82 Interbay/Intrabay AMHS SEM
SEMI E88 Stocker SEM
SEMI E91 Prober SEM
SEMI E122 Tester SEM
SEMI E123 Handler SEM
SEMI E130 300mm Prober CEM

Learn more about EIB GEM

EIB EDA – Supported SEMI Standards

SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E145 Measurement Unit Symbols in XML
SEMI E164 EDA Common Metadata
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
EDA EDA Freeze 1105 and 0710

Learn more about EIB EDA

EIB 300 – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E142 Substrate Mapping
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol
Supported SEMI Standards through configuration:
SEMI E82 Interbay/Intrabay AMHS SEM
SEMI E88 Stocker SEM
SEMI E91 Prober SEM
SEMI E122 Tester SEM
SEMI E123 Handler SEM
SEMI E130 300mm Prober CEM

Learn more about EIB 300

EIB Factory – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E142 Substrate Mapping
SEMI E145 Measurement Unit Symbols in XML
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E164 EDA Common Metadata
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol
EDA EDA Freeze 1105 and 0710
Supported SEMI Standards through configuration:
SEMI E82 Interbay/Intrabay AMHS SEM
SEMI E88 Stocker SEM
SEMI E91 Prober SEM
SEMI E122 Tester SEM
SEMI E123 Handler SEM
SEMI E130 300mm Prober CEM

Learn more about EIB Factory

ConX300 – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E109 Reticle and Pod Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)

Learn more about ConX300

GWGEM – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)

Learn more about GWGEM

SDR – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E37 HSMS (High Speed Message Service)

Learn more about SDR

portA – Supported SEMI Standards

SEMI E120 Common Equipment Model (CEM)
SEMI E120.1 XML Schema for the Common Equipment Model (CEM)
SEMI E125 Equipment Self-Description
SEMI E125.1 Specification for SOAP Binding for Equipment Self Description (EqSD)
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E132.1 Provisional Specification for XML Messaging for Process Control System (PCS)
SEMI E134 Data Collection Management
SEMI E134.1 Specifications for SOAP Binding of Data Collection Management (DCM)
SEMI E138 XML Common Components
SEMI E145 Classification for Measurement Unit Symbols in XML
EDA EDA Freeze 1105 and 0710

Learn more about portA

PTO – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E10 Equipment Reliability, Availability, Maintainability, and Utilization
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E142 Substrate Mapping
SEMI E145 Measurement Unit Symbols in XML
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E164 EDA Common Metadata
SEMI E172 Specification for SECS Equipment Data Dictionary (SEDD)
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol
EDA EDA Freeze 1105 and 0710

Learn more about PTO

PFAT – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management

Learn more about PFAT

SECSIM Pro+ – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management

Learn more about SECSIM Pro+

CCS Product Suite – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)

Learn more about CCS Product Suite

DiDaCT – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI PV2 Guide for PV Equipment Communication Interfaces (PVECI)

Learn more about DiDaCT

PEER EDA Tuner – Supported SEMI Standards

SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E125.1 SOAP Binding for Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E132.1 SOAP Binding for Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E134.1 SOAP Binding of Data Collection Management
SEMI E138 XML Common Components
SEMI E145 Measurement Unit Symbols in XML
SEMI E164 EDA Common Metadata
EDA EDA Freeze 1105 and 0710

Learn more about PEER EDA Tuner

Learn more about SEMI Standards
Overview
SECS/GEM
GEM300
SEMI PV2
EDA
Definitions of SEMI Standards
Training
SEMI Standards leadership