SEMI Standards product support
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Supported SEMI Standards by product
Click a product below to learn which SEMI Standards it supports. From these lists, click a link to learn more about any particular SEMI Standard.
Please note: we are active on various SEMI automation standards committees, and we review all updates to the standards as they are published. Whenever we release a new version of a PEER Group product, we specify compliance to specific versions of the SEMI standards. Your product version might also support later versions of a SEMI standard since many updates to the standards are editorial, part of a regular 5-year renewal cycle, or have no effect on your product’s functionality. To inquire about support for more recent versions of any SEMI standard, please contact our technical support team through our secure customer support portal.
EIB OEM – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI E116 | Equipment Performance Tracking (EPT) |
| SEMI E120 | Common Equipment Model (CEM) |
| SEMI E121 | XML Usage |
| SEMI E125 | Equipment Self-Description |
| SEMI E128 | XML Message Structures |
| SEMI E132 | Client Authentication and Authorization |
| SEMI E134 | Data Collection Management |
| SEMI E138 | XML Common Components |
| SEMI E142 | Substrate Mapping |
| SEMI E145 | Measurement Unit Symbols in XML |
| SEMI E148 | TS-Clock |
| SEMI E157 | Module Process Tracking |
| SEMI E164 | EDA Common Metadata |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI E173 | XML SECS-II Message Notation |
| SEMI A3 | Printed Circuit Board Equipment Communication Interfaces (PCBECI) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
| SEMI G84 | Strip Map Protocol |
| EDA | EDA Freeze 1105 and 0710 |
The following SEMI Standards can be supported in EIB® OEM but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.
EIB GEM – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E142 | Substrate Mapping |
| SEMI E148 | TS-Clock |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI E173 | XML SECS-II Message Notation |
| SEMI A3 | Printed Circuit Board Equipment Communication Interfaces (PCBECI) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
| SEMI G84 | Strip Map Protocol |
The following SEMI Standards can be supported in EIB® GEM but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.
EIB 300 – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI E116 | Equipment Performance Tracking (EPT) |
| SEMI E142 | Substrate Mapping |
| SEMI E148 | TS-Clock |
| SEMI E157 | Module Process Tracking |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI E173 | XML SECS-II Message Notation |
| SEMI A3 | Printed Circuit Board Equipment Communication Interfaces (PCBECI) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
| SEMI G84 | Strip Map Protocol |
The following SEMI Standards can be supported in EIB® 300 but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.
EIB EDA – Supported SEMI Standards
| SEMI E120 | Common Equipment Model (CEM) |
| SEMI E121 | XML Usage |
| SEMI E125 | Equipment Self-Description |
| SEMI E128 | XML Message Structures |
| SEMI E132 | Client Authentication and Authorization |
| SEMI E134 | Data Collection Management |
| SEMI E138 | XML Common Components |
| SEMI E145 | Measurement Unit Symbols in XML |
| SEMI E164 | EDA Common Metadata |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI E173 | XML SECS-II Message Notation |
| SEMI A3 | Printed Circuit Board Equipment Communication Interfaces (PCBECI) |
| EDA | EDA Freeze 1105 and 0710 |
GWGEM – Supported SEMI Standards
ConX300 – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI E109 | Reticle and Pod Management |
| SEMI E116 | Equipment Performance Tracking (EPT) |
| SEMI E148 | TS-Clock |
| SEMI E157 | Module Process Tracking |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
NexEDA – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI E109 | Reticle and Pod Management |
| SEMI E116 | Equipment Performance Tracking (EPT) |
| SEMI E148 | TS-Clock |
| SEMI E157 | Module Process Tracking |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
portA – Supported SEMI Standards
| SEMI E120 | Common Equipment Model (CEM) |
| SEMI E125 | Equipment Self-Description |
| SEMI E128 | XML Message Structures |
| SEMI E132 | Client Authentication and Authorization |
| SEMI E134 | Data Collection Management |
| SEMI E138 | XML Common Components |
| SEMI E145 | Classification for Measurement Unit Symbols in XML |
| EDA | EDA Freeze 1105 and 0710 |
SDRPlus – Supported SEMI Standards
SDR – Supported SEMI Standards
PTO – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E10 | Equipment Reliability, Availability, Maintainability, and Utilization |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E84 | Carrier Handoff |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI E116 | Equipment Performance Tracking (EPT) |
| SEMI E120 | Common Equipment Model (CEM) |
| SEMI E121 | XML Usage |
| SEMI E125 | Equipment Self-Description |
| SEMI E128 | XML Message Structures |
| SEMI E132 | Client Authentication and Authorization |
| SEMI E134 | Data Collection Management |
| SEMI E138 | XML Common Components |
| SEMI E142 | Substrate Mapping |
| SEMI E145 | Measurement Unit Symbols in XML |
| SEMI E148 | TS-Clock |
| SEMI E157 | Module Process Tracking |
| SEMI E164 | EDA Common Metadata |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
| SEMI G84 | Strip Map Protocol |
| EDA | EDA Freeze 1105 and 0710 |
EIB Factory – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI E116 | Equipment Performance Tracking (EPT) |
| SEMI E120 | Common Equipment Model (CEM) |
| SEMI E121 | XML Usage |
| SEMI E125 | Equipment Self-Description |
| SEMI E128 | XML Message Structures |
| SEMI E132 | Client Authentication and Authorization |
| SEMI E134 | Data Collection Management |
| SEMI E138 | XML Common Components |
| SEMI E142 | Substrate Mapping |
| SEMI E145 | Measurement Unit Symbols in XML |
| SEMI E148 | TS-Clock |
| SEMI E157 | Module Process Tracking |
| SEMI E164 | EDA Common Metadata |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI E173 | XML SECS-II Message Notation |
| SEMI A3 | Printed Circuit Board Equipment Communication Interfaces (PCBECI) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
| SEMI G84 | Strip Map Protocol |
| EDA | EDA Freeze 1105 and 0710 |
The following SEMI Standards can be supported in EIB® Factory but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.
FAST FW – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI E116 | Equipment Performance Tracking (EPT) |
| SEMI E120 | Common Equipment Model (CEM) |
| SEMI E121 | XML Usage |
| SEMI E125 | Equipment Self-Description |
| SEMI E128 | XML Message Structures |
| SEMI E132 | Client Authentication and Authorization |
| SEMI E134 | Data Collection Management |
| SEMI E138 | XML Common Components |
| SEMI E142 | Substrate Mapping |
| SEMI E145 | Measurement Unit Symbols in XML |
| SEMI E148 | TS-Clock |
| SEMI E157 | Module Process Tracking |
| SEMI E164 | EDA Common Metadata |
| SEMI E172 | SECS Equipment Data Dictionary (SEDD) |
| SEMI E173 | XML SECS-II Message Notation |
| SEMI A3 | Printed Circuit Board Equipment Communication Interfaces (PCBECI) |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |
| SEMI G84 | Strip Map Protocol |
| EDA | EDA Freeze 1105 and 0710 |
The following SEMI Standards can be supported in FAST FW™ but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.
PEER EDA Tuner – Supported SEMI Standards
| SEMI E120 | Common Equipment Model (CEM) |
| SEMI E121 | XML Usage |
| SEMI E125 | Equipment Self-Description |
| SEMI E128 | XML Message Structures |
| SEMI E132 | Client Authentication and Authorization |
| SEMI E134 | Data Collection Management |
| SEMI E138 | XML Common Components |
| SEMI E145 | Measurement Unit Symbols in XML |
| SEMI E164 | EDA Common Metadata |
| EDA | EDA Freeze 1105 and 0710 |
PFAT – Supported SEMI Standards
CCS Product Suite – Supported SEMI Standards
SECSIM Pro+ – Supported SEMI Standards
DiDaCT – Supported SEMI Standards
| SEMI E4 | SECS-I |
| SEMI E5 | SECS-II |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS (High Speed Message Service) |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E84 | Carrier Handoff |
| SEMI E87 | Carrier Management |
| SEMI E90 | Substrate Management |
| SEMI E94 | Control Job Management |
| SEMI PV2 | PV Equipment Communication Interfaces (PVECI) |