SEMI Standards product support

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Supported SEMI Standards by product

Click a product below to learn which SEMI Standards it supports. From these lists, click a link to learn more about any particular SEMI Standard.

Please note: we are active on various SEMI automation standards committees, and we review all updates to the standards as they are published. Whenever we release a new version of a PEER Group product, we specify compliance to specific versions of the SEMI standards. Your product version might also support later versions of a SEMI standard since many updates to the standards are editorial, part of a regular 5-year renewal cycle, or have no effect on your product’s functionality. To inquire about support for more recent versions of any SEMI standard, please contact our technical support team through our secure customer support portal.

EIB OEM – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E142 Substrate Mapping
SEMI E145 Measurement Unit Symbols in XML
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E164 EDA Common Metadata
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI E173 XML SECS-II Message Notation
SEMI A3 Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI PV2 PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol
EDA EDA Freeze 1105 and 0710

The following SEMI Standards can be supported in EIB® OEM but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.

SEMI E82 Interbay/Intrabay AMHS SEM
SEMI E88 Stocker SEM
SEMI E91 Prober SEM
SEMI E122 Tester SEM
SEMI E123 Handler SEM
SEMI E130 300mm Prober CEM

Learn more about EIB OEM

EIB GEM – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E142 Substrate Mapping
SEMI E148 TS-Clock
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI E173 XML SECS-II Message Notation
SEMI A3 Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI PV2 PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol

The following SEMI Standards can be supported in EIB® GEM but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.

SEMI E82 Interbay/Intrabay AMHS SEM
SEMI E88 Stocker SEM
SEMI E91 Prober SEM
SEMI E122 Tester SEM
SEMI E123 Handler SEM
SEMI E130 300mm Prober CEM

Learn more about EIB GEM

EIB EDA – Supported SEMI Standards

SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E145 Measurement Unit Symbols in XML
SEMI E164 EDA Common Metadata
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI E173 XML SECS-II Message Notation
SEMI A3 Printed Circuit Board Equipment Communication Interfaces (PCBECI)
EDA EDA Freeze 1105 and 0710

Learn more about EIB EDA

EIB 300 – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E142 Substrate Mapping
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI E173 XML SECS-II Message Notation
SEMI A3 Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI PV2 PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol

The following SEMI Standards can be supported in EIB® 300 but require code extensions and customizations, including implementation of the state machines, objects, and attributes described in the standards.

SEMI E82 Interbay/Intrabay AMHS SEM
SEMI E88 Stocker SEM
SEMI E91 Prober SEM
SEMI E122 Tester SEM
SEMI E123 Handler SEM
SEMI E130 300mm Prober CEM

Learn more about EIB 300

ConX300 – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E109 Reticle and Pod Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI PV2 PV Equipment Communication Interfaces (PVECI)

Learn more about ConX300

GWGEM – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI PV2 PV Equipment Communication Interfaces (PVECI)

Learn more about GWGEM

SDR – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E37 HSMS (High Speed Message Service)

Learn more about SDR

portA – Supported SEMI Standards

SEMI E120 Common Equipment Model (CEM)
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E145 Classification for Measurement Unit Symbols in XML
EDA EDA Freeze 1105 and 0710

Learn more about portA

NexEDA – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E109 Reticle and Pod Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI PV2 PV Equipment Communication Interfaces (PVECI)

Learn more about NexEDA

PTO – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E10 Equipment Reliability, Availability, Maintainability, and Utilization
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)
SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E142 Substrate Mapping
SEMI E145 Measurement Unit Symbols in XML
SEMI E148 TS-Clock
SEMI E157 Module Process Tracking
SEMI E164 EDA Common Metadata
SEMI E172 SECS Equipment Data Dictionary (SEDD)
SEMI PV2 PV Equipment Communication Interfaces (PVECI)
SEMI G84 Strip Map Protocol
EDA EDA Freeze 1105 and 0710

Learn more about PTO

PFAT – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management

Learn more about PFAT

SECSIM Pro+ – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management

Learn more about SECSIM Pro+

CCS Product Suite – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI E116 Equipment Performance Tracking (EPT)

Learn more about CCS Product Suite

DiDaCT – Supported SEMI Standards

SEMI E4 SECS-I
SEMI E5 SECS-II
SEMI E30 GEM (Generic Equipment Model)
SEMI E37 HSMS (High Speed Message Service)
SEMI E39 Object Services
SEMI E40 Process Job Management
SEMI E84 Carrier Handoff
SEMI E87 Carrier Management
SEMI E90 Substrate Management
SEMI E94 Control Job Management
SEMI PV2 PV Equipment Communication Interfaces (PVECI)

Learn more about DiDaCT

PEER EDA Tuner – Supported SEMI Standards

SEMI E120 Common Equipment Model (CEM)
SEMI E121 XML Usage
SEMI E125 Equipment Self-Description
SEMI E128 XML Message Structures
SEMI E132 Client Authentication and Authorization
SEMI E134 Data Collection Management
SEMI E138 XML Common Components
SEMI E145 Measurement Unit Symbols in XML
SEMI E164 EDA Common Metadata
EDA EDA Freeze 1105 and 0710

Learn more about PEER EDA Tuner

Learn more about SEMI Standards
Overview
SECS/GEM
GEM300
SEMI PV2
EDA
Definitions of SEMI Standards
Training
SEMI Standards leadership
Learn more about SEMI Standards
Overview
SECS/GEM
GEM300
SEMI PV2
EDA
Definitions of SEMI Standards
Training
SEMI Standards leadership
Learn more about SEMI Standards
Overview
SECS/GEM
GEM300
SEMI PV2
EDA
Definitions of SEMI Standards
Training
SEMI Standards leadership