GEM300 SEMI Standards

Advanced remote process control and material handling

GEM300 Standards

  • SEMI E39: Object Services
  • SEMI E40: Specification for Process Job Management
  • SEMI E87: Specification for Carrier Management
  • SEMI E90: Specification for Substrate Management
  • SEMI E94: Specification for Control Job Management
  • SEMI E116: Specification for Equipment Performance Tracking

Working in conjunction with GEM (SEMI E30) Standard, the GEM300 suite of SEMI Standards describe a more advanced approach to enable remote process control and material handling.

Developed when the emerging 300mm wafer size and smaller chip topologies made it impractical for local operators to load and unload material , these standards introduced several opportunities for increased automation capabilities, significantly improving tool and factory throughput.

Like the GEM (SEMI E30) Standard, GEM300 Standards describe how specific SECS-II messages should be used to execute scenarios, provide state models, and mandate what detailed events and data the equipment must report for almost every possible action.

GEM300-compliant communication and testing software

OEM

GEM300 communications for OEMs

EIB OEM
  • 300mm communications framework with data management capabilities
Factory

GEM300 communications for factories

EIB Factory
  • Communications framework for connecting factory host systems to equipment in 200mm and 300mm semiconductor factories
PFSC
  • Advanced equipment factory integration and station controller development platform
OEM &
Factory

Test GEM300 communications for OEMs and factories

PFAT
  • Dynamic testing solution to ensure equipment meets factory requirements

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