PTO supported hardware
Products & services / OEM products & services / Equipment automation / PTO / PTO supported hardware
Supported hardware devices
PEER® Tool Orchestrator includes a library of existing, proven hardware drivers for integrated EFEMs, load ports, tag readers, robots, aligners, and vacuum devices. This gives PTO® the ability to immediately communicate with many of the common components that OEMs use to build their equipment. PTO’s flexible architecture also makes it easy to develop additional hardware drivers whenever needed. Please contact global sales if the following list does not include the hardware components on your tool.
Integrated EFEM
| Vendor | Model | Comments |
|---|---|---|
| Brooks | FabExpress Platform | Communications via Wave II (Series 8) controller: single end-effector (used with Reliance ATR robot) |
| Brooks | JET Platform | Communications via Fusion (Series 9) controller: dual end-effector (used with RAZOR robot) |
| Brooks (Asyst) | Plus-Portal EFEM | Communications via Smart-Plus S/W |
| RECIF | RECIF API 1.7.0.0 | Atmospheric EFEM system, with light tower, load port, FFU, robot, tag reader, wafer ID reader Optional InfoPad support for load ports |
| Rorze | RR Series | Atmospheric EFEM system |
| Hirata | PLP EFEM | Communication via TCP socket using the EQ Master interface Supports LightTower, E84 LoadPort, Carrier ID Reader, Panel ID Reader (i.e. a wafer ID reader) and Robot components |
Robots
| Vendor | Model | Comments |
|---|---|---|
| Brooks | Reliance ATR | Via above Wave II (Series 8) Controller |
| Brooks | RAZOR | Via above Fusion (Series 9) Controller |
| Brooks | MagnaTran 7 (Mag7) | Single arm and dual arm |
| Genmark | GPR Series | |
| ISEL | IWH Series 1, Series 3 (dual-arm) |
Requires firmware v. 2.2 or later for dual-arm robots |
| JEL | GCR4000 series | |
| Kawasaki | D60 | Includes Digital I/O for FFU, light curtain, etc. |
| Newport-Kensington | Multi-Link Robots | Communications via Model 4000 Controller |
| Milara | Diamond H1, H3, H4 (dual-arm), H5 | Requires firmware v. 2.2 or later for dual-arm robots |
| MOOG | ATM-600 | Single arm |
| PEER Group | PTO.TagAccess | Can be used with any vendor’s tag-based robot (e.g. controlled via Modbus or OPC) |
| Persimmon | All controller models | Requires firmware v. 3.20.02 or later |
| PRI | Equipe | ATM series |
| Rorze | RR734 | Atmospheric robot; dual end-effector |
| Yaskawa | SR100 | Any robot using the SR100 protocol |
| Hirata | Via controller |
Load Ports
| Vendor | Model | Comments |
|---|---|---|
| Brooks (Asyst) | IsoPort | Supports FOUP |
| Brooks (Asyst) | VersaPort | Supports FOUP, SMIF, MOCA (Open Cassette) |
| Brooks (Asyst) | Series 3 | |
| Brooks | LEAP/Vision | Directly or via Fusion (Series 9) or eConnect Controller |
| Brooks | 6M | Via above Series 8 Controller, SMIF |
| Brooks | FixLoad 6 | |
| Brooks | VCE 6 | Vertical Cassette Elevator |
| CHAD | SMIF-EZ | Supports SMIF |
| MOOG | BX-300 | Vertical Cassette Elevator |
| PEER Group | PTO.TagAccess | Can be used with any vendor’s tag-based load port (e.g. controlled via Modbus or an OPC) |
| Rorze | RV201 | Supports FOUP. No direct E84 support |
| Sinfonia | SELOP 7 Type B | Optional InfoPad support. Uses an AES API. Please contact PEER Group and AES about required customizations |
| TDK | TAS300 | Optional InfoPad support for load ports. Supports E4 and J1 type load ports |
| Hirata | Via controller |
Pre-Aligners
| Vendor | Model | Comments |
|---|---|---|
| Brooks | AcuLine | Via above Series 8 Controller |
| Brooks | Fusion | Via above Series 9 Controller |
| ISEL | LPA Series | Requires firmware v. 3.1.8 or later |
| Kensington | ||
| Logosol | LPA series | |
| Milara | PRE 200, PRE 300 | Requires firmware v. 2.2 or later |
| MOOG | PA-200 | |
| Yaskawa | SR100 | Any pre-aligner using the SR100 protocol |
CarrierID Reader
| Vendor | Model | Comments |
|---|---|---|
| Brooks | SOLID | |
| Brooks (Asyst) | AdvanTag | |
| Hermos | Via Brooks RS232 Transponder | |
| Keyence | BL600 | |
| Omron | V700 | |
| TDK | TAS300 | Supports E4 and J1 type load ports |
| Hirata | Via controller |
Vacuum Control
| Vendor | Model | Comments |
|---|---|---|
| Brooks | MX400 | Safety Node communications via a PTO TagAccessService (TAS) tool component |
| Adixen | A100, ACP40, Ath500 | Pumps |
| Alcatel | AL100 | Pump |
| Granville-Phillips | Series 275 and 354 | Gauges |
| PEER Group | PTO.TagAccess | Can be used with any vendor’s tag-based Gauge, Valve, and Atmospheric Switch (e.g. controlled via Modbus or OPC) |
| Pfeiffer | Pumps |
WaferID Reader
| Vendor | Model | Comments |
|---|---|---|
| Cognex | In-Sight 1700 | |
| RECIF | Via controller | |
| Hirata | Via controller |
Miscellaneous
| Vendor | Model | Comments |
|---|---|---|
| Advantech | Adam6000 device family | Light Tower communications via PTO’s Modbus TagAccessService |
| Brooks | Series 9 | Minifan Flipper – various hardware vendors (e.g., Owens) |
| Brooks | Light Tower and FFU via eConnect .NET controller | |
| GetControl SPC | Used for E84 hand-off support | |
| Owens | 6068 | Flipper |
| PEER Group | PTO.TagAccess | Use with any vendor’s tag-based Light Tower and FFU (e.g., controlled via Modbus or OPC) |
| PLC devices | Via OPC UA, Omron FINS, SST, RSLinx, RSLogix 5000, Beckhoff TwinCAT |
Contact PEER Group for specific vendors and models
|
| I/O devices | Via Modbus TCP, Modbus RTU | Please contact PEER Group for specific vendors and models |