Artificial Intelligence for Real Time Cluster Tool Scheduling
We presented this topic at apc|m Conference on April 5, 2022, and at ASMC conference on May 3, 2022.
Semiconductor cluster tools present a complex scheduling challenge where process-specific requirements must be balanced against the need to achieve maximum wafer throughput in a fault-tolerant manner. Building on previously presented machine-learning research, this presentation investigates the potential of introducing a tool-side AI-based scheduler that is capable of functioning in a high-mix environment while learning over time, reducing the amount of human engineering required to produce a high-quality schedule.
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