ClassOne solves complex wafer scheduling using PEER Group’s Predictive Planner
Available in layouts with up to 16 configurable process chambers, ClassOne Technology’s Solstice® single-wafer processing platform delivers exceptional scalability, flexibility, and performance in a single, modular system.
To achieve this high degree of flexibility, ClassOne product developers needed a solution to overcome significant automation and scheduling challenges as wafers travel between chambers during processing.
The best path forward
“Depending on the specific layout, the wafer might start in an SRD chamber,” explains Joe Gaustad, Director of Product Development at ClassOne Technology. “It may then head to a copper chamber, return to the SRD for short rinse, move to a nickel chamber, then back through the SRD, then on to a tin, silver, or gold chamber before finishing off with a final spin, rinse, and dry.”
Finding the optimal path while avoiding deadlocks, minimizing dwell time, and maximizing throughput quickly becomes a scheduling nightmare.
This challenge is amplified by the fact that every Solstice system shipped from ClassOne’s Kalispell, Montana-based factory is customized for each customer. “We build many configurations with our chambers and customer process recipes can vary greatly,” states Gaustad, “from a software perspective, each tool is unique.”
Spec’ing a new stack
To fully leverage the innovative capabilities of its hardware, ClassOne needed an equally robust and sophisticated software solution.
“Our previous software had become outdated. Implementing new features and optimizations was cumbersome or even impossible,” remarks Gaustad. “We needed to rebuild the software stack from the ground up.”
Early in the procurement phase, Johann Floeckner, a Senior Software Engineer at ClassOne, specified the new software needed to support 300mm SEMI® Standards by default and integrate SECS/GEM into its basic variable types.
Most importantly, the software needed to uncover the optimal path for each customer’s specific wafer processing flow.
The solution: Predictive Planner
“Since our tools allow customers to define the wafer flow through the available chambers in any combination, a sophisticated planner was required,” shares Floeckner, adding: “It had to detect deadlocks, optimize for high throughput, perform dynamic rescheduling, minimize wait times, and offer additional features such as chamber prioritization for parallel processing and cleanup after a power outage.”
PTO Predictive Planner
The PTO Predictive Planner uses artificial intelligence (AI) to automatically determine the optimal wafer path and coordinate scheduling in multi-process, multi-chamber semiconductor equipment. It adheres to predefined recipe parameters and SEMI Standards constraints to determine the most efficient material movement sequence while avoiding deadlocks and unnecessary dwell time, improving overall tool throughput.
During discussions with PEER Group, boundary parameters for the planner were defined. Based on PEER Group’s expertise in adaptive scheduling and material movement, it was determined that the PEER Tool Orchestrator’s (PTO) Predictive Planner would meet all ClassOne’s requirements.
After evaluating multiple solutions from different suppliers, ClassOne selected PTO and EIB OEM because of its advanced scheduling capabilities and proven adoption across the semiconductor industry. “PEER Group’s software library is quite mature,” says Gaustad, adding: “and having a platform that we know is used and proven in the semiconductor industry was important to us.”
Expert help
To speed up development, ClassOne engaged PEER Group OEM Services for the initial design and software build. “We don’t have a large software team, which made PEER Group a great partner,” Gaustad explains. “PEER Group delivered 90% of the solution, and we customize the remaining 10% for each tool.”
This customization involves defining the chambers, tanks, heaters, valves, and other components used in the tool, and configuring these components along with all associated services and visualization pages. When setting up a tool for a customer, the ClassOne software team uses PTO’s PEER Tool Composer (PTC) utility to manage all components and configurations and accelerate tool development and delivery.
“As we’ve grown the Solstice platform…we needed the advanced scheduling and automation of PTO to fully enable the true potential of our tool.”
Joe Gaustad, Director of Product Development, ClassOne Technology
Planning for success today, and into the future
The Predictive Planner was pivotal in helping ClassOne realize the full potential of the Solstice platform.
“Having a planner that can look ahead and maximize throughput across the system is extremely valuable,” notes Gaustad. “As we’ve grown the Solstice platform to offer multiple chambers and chamber types, we needed the advanced scheduling and automation of PTO to fully enable the true potential of our tool.”
This success continues with the launch of Solstice Max, the latest iteration of ClassOne’s flagship platform. Engineered for higher throughput, Solstice Max features multiple robots and pass-through stations for increased performance and customization, as well as more degrees of freedom in the scheduling equation.
Thanks to its fully extensible architecture, PTO and the Predictive Planner scale seamlessly as tools increase in complexity. “The planner is being used on Solstice Max to maximize capability and throughput,” says Gaustad, allowing ClassOne to push the boundaries of Solstice and provide customers with a highly advanced platform that meets their evolving wet processing needs.
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