Cybersecurity SEMI Standards

SEMI E187 and SEMI E188: Baseline cybersecurity standards for semiconductor manufacturing

Cybersecurity SEMI Standards

  • SEMI E187: Specification for Cybersecurity of Fab Equipment
  • SEMI E188: Specification for Malware Free Equipment Integration

With the frequency of cyberattacks against the semiconductor manufacturing supply chain increasing in recent years, SEMI is taking a proactive response with the development and publication of the first cybersecurity SEMI Standards, E187 and E188. 

SEMI E187

SEMI E187 has been developed to provide a baseline level of security for semiconductor fab equipment by addressing required measures for cybersecurity in the design, operation, and maintenance of semiconductor production equipment and automated material handling system.

E187 applies to equipment running Microsoft Windows and Linux operating systems and provides fundamental requirements in the following areas:

  • Operating system (OS) support
  • Network security
  • Endpoint protection
  • Security monitoring
SEMI E188

SEMI E187 focuses on overarching view of the equipment’s security needs. SEMI E188 provides a framework for how to mitigate the propagation of malware to manufacturing facilities during tool integration and support activities.

This Standard defines protection systems and processes that ensure the integrity of manufacturing equipment, specifically defining the requirements for:

  • Controlling access to manufacturing equipment via networks, removable media, etc.
  • Manufacturing equipment installation
  • Manufacturing equipment upgrade and support tasks including equipment restoration, such as hard disk drives (HDD) or computer component replacement
  • Identification and mitigation of vulnerabilities present in equipment software

Want to know more?

Read this article, Securing Chip Manufacturing Against Growing Cyber Threats, for a summary of the Global Cybersecurity Forum which took place during SEMICON® West 2023.

The development of a robust suite of cybersecurity SEMI Standards is still in its infancy. Fortunately, work is currently being done to address this. As a founding company of the SEMI Cybersecurity Consortium, PEER Group is active in establishing the path forward to develop and apply new SEMI cybersecurity Standards. Additionally, PEER Group products utilize cybersecurity best-practices to ensure the safety and security of tools running our software.

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