Best-in-class tool automation and control software for rapid development and integration

Rapid hardware integration

PTO’s extensible hardware interoperability framework enables pre-configured exchange of a large collection of drivers for all major commercial hardware, including robots, aligners, load ports, VCEs, pumps, valves, gauges, PLCs, I/O blocks, and more, allowing for the rapid development and integration of custom hardware components.

Predictive planner

Uses artificial intelligence (AI) to automatically determine the optimal wafer path and coordinate scheduling in multi-process, multi-chamber tools while avoiding deadlocks and unnecessary dwell time to improve overall throughput.

Flexible material management

PTO supports multiple material types, such as production wafers, panels, reticles, filler wafers, thin wafer holders, satellites, and JEDEC trays, with full control over contextual data for on-tool analysis or reporting to the factory host.

Tailored vacuum control

Create custom vacuum control sequences that match the vacuum schematic of your tool. Execute vacuum commands during fully automated, manual, or maintenance processes.

Dynamic recipe management

Create and manage recipes designed for any type of tool, from simple, single-chamber recipes to cluster tools with complex flow recipes and reusable modules.

Modular Web GUI framework

Use PTO’s modular Web UI framework and HMI designer to create tool-specific and standards-based screens with responsive design and localization. Screens can be accessed on-tool or remotely from any browser-based device that is connected to your organization’s factory network using the PTO Web UI.

Powerful data reporting and analysis

Collect and customize the way data is displayed and charted for on-the-fly analysis of your equipment status, or review performance trends using historical data. Visually navigate the time-series data generated by your tool to focus on the data of interest and understand your tool’s overall equipment effectiveness (OEE).

Expansive substrate map

Dynamically visualize substrate material with up to 100,000 dies. Ideal for high-volume substrate tools and advanced packaging applications.

Seamless release management

Easily configure the tool at the platform or individual tool level to allow quick customizations in compliance with varying factory requirements. PTO can support deployment and software upgrade scenarios spanning the lifecycle of a tool—from tool design in the lab, to in-field equipment integration, and full factory deployment.

Configurable security

Configurable, role-based security provides complete runtime control over the accessibility and capabilities available to each user. Add optional integration with organizational security infrastructure such as Active Directory, LDAP, or SSO. GUI screens can adjust their appearance and capabilities dynamically based on security settings while the PTO server environment verifies credentials before allowing any remote command to execute.