SEMI E142: Specification for Substrate Mapping
Describes how the factory host and equipment can exchange substrate map data through a standard SECS/GEM interface, using typical GEM event reports and SEMI E39 object requests (Stream 14 messages). Each substrate map provides details about individual locations (units, cells, dies, etc.) on a substrate (wafer, tray, strip, etc.), such as their processing or analysis results or bin values.
A number of our products support SEMI E142.