SEMI E87: Specification for Carrier Management (CMS)
Automated material management is critical for lights-out host control in a fabrication facility. This standard provides detailed guidelines for many different material handling variations and error scenarios that may occur. The carrier loading/unloading sequence can be initiated by the local operator or by the factory host through a series of Stream 3 messages. Substrates (wafers) can only be accessed for processing once the carrier holding them has been successfully loaded, and its CarrierID and slot map read and validated. Typically, once processing is complete, material is returned to its carrier, which can then be unloaded or used in subsequent processing requests. To ensure operator, material, and hardware safety, load port and carrier states are monitored closely and are used to orchestrate these complex handoff procedures. Learn more about SEMI E87 CRTU Prediction.
The SEMI E87 standard was designed to accommodate both Fixed Buffer tools (substrates are removed directly from carriers on external load ports) and Internal Buffer tools (carriers are brought into storage locations inside the tool before substrate access can begin). The standard can also be used whether material is delivered to the equipment by an operator, or via an Automated Material Handling System (AMHS), as described in SEMI E84.
A number of our products support SEMI E87.