SEMI E157: Specification for Module and Substrate Process Tracking
Allows tools to report process-related data to the factory host on an ongoing basis, with enough detail that the information can be used to adjust process control and improve product quality or throughput. As each step in a process is started or completed in a chamber, the equipment can report relevant context data, such as the current recipe and step, recipe parameter values, calculated processing results, raw sensor data, etc. This standard describes the required state models, events, and data that must be made available, and how the data should be published via a SECS/GEM (SEMI E5 and SEMI E30) communication channel, or an EDA (SEMI E125 and SEMI E134) interface.
A number of our products support SEMI E157.