SEMI E109: Specification for Reticle and Pod Management (RPMS)
Similar to SEMI E87, this standard describes the additional automated material handling scenarios that lithography, reticle inspection, and reticle stocker tools need to manage Pods (carriers) and the Reticles (substrates) within them. In addition to the typical loading/unloading scenarios for Fixed Buffer and Internal Buffer tools described by SEMI E87, SEMI E109 also encompasses locking and unlocking of pods. Once the pod loading sequence has completed successfully, reticles can be move through the tool via TransferJobs or explicit move instructions. Extra inspection and qualification data gathered for each reticle determines how long it may be used in production.
A number of our products support SEMI E109.