SEMI E130: Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
This standard defines host interactions with Prober testing tools that perform electrical measurements on units, when the tool provides a 300mm interface in addition to the normal GEM interface. This standard provides more sophisticated control over the testing process than the SEMI E91 standard. While Prober jobs are executed as normal SEMI E94 / SEMI E40 Control Jobs and Process Jobs, additional remote commands are available for moving substrates through the tool, moving the prober to specific locations on the substrate, and inspecting/cleaning the probe between measurements. The standard describes in detail specific processing scenarios and their relationship to Control Jobs and Process Jobs, the data that must be reported when testing is complete, process program requirements for configurable parameters when the job is defined, and when different movement, probe management, and testing activities are valid, based on the overall tool state.
A number of our products can support this SEMI Standard through code extensions and customizations, including implementation of the described state machines, objects, and attributes.